Zhang, Shan-Ting ; Rouvière, Jean-Luc ; Consonni, Vincent ; Roussel, Hervé ; Rapenne, Laetitia ; Pernot, Etienne ; Muñoz-Rojas, David ; Klein, Andreas ; Bellet, Daniel (2017)
High quality epitaxial fluorine-doped SnO2 films by ultrasonic spray pyrolysis: Structural and physical property investigation.
In: Materials & Design, 132
doi: 10.1016/j.matdes.2017.07.037
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
Despite its wide use in the display and photovoltaic industries, fluorine-doped tin oxide (F:SnO2, FTO) has been studied only in its polycrystalline form. In this work, we report on the first growth of epitaxial FTO thin film by ultrasonic spray pyrolysis – a simple chemical deposition method – and we reveal the structure-property interplay by investigating in details its growth, morphology and strain/defects. Epitaxial FTO films are successfully grown on (110) rutile TiO2 single crystals and form mosaic domains with an out-of-plane distribution smaller than 0.5°, showing high structural quality comparable to epitaxial films prepared by molecular beam epitaxy and pulsed-laser deposition. Owing to the large lattice mismatch with rutile TiO2, the FTO film develops significant structural defects to release the epitaxial strain and is consequently nearly fully relaxed with a slight residual strain of 0.1–0.2%. With the help of an innovative nano-beam precession electron diffraction technique, the strain distribution is mapped at the TiO2/FTO interface, from which we identify the interfacial and secondary strain relaxation taking place mainly in the first 22 nm in the FTO film. The Hall-mobility of the epitaxial FTO films is close to the state-of-the-art and expected to improve further at lower doping concentrations.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2017 |
| Autor(en): | Zhang, Shan-Ting ; Rouvière, Jean-Luc ; Consonni, Vincent ; Roussel, Hervé ; Rapenne, Laetitia ; Pernot, Etienne ; Muñoz-Rojas, David ; Klein, Andreas ; Bellet, Daniel |
| Art des Eintrags: | Bibliographie |
| Titel: | High quality epitaxial fluorine-doped SnO2 films by ultrasonic spray pyrolysis: Structural and physical property investigation |
| Sprache: | Englisch |
| Publikationsjahr: | 15 Oktober 2017 |
| Verlag: | Elsevier Science Publishing |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Materials & Design |
| Jahrgang/Volume einer Zeitschrift: | 132 |
| DOI: | 10.1016/j.matdes.2017.07.037 |
| Kurzbeschreibung (Abstract): | Despite its wide use in the display and photovoltaic industries, fluorine-doped tin oxide (F:SnO2, FTO) has been studied only in its polycrystalline form. In this work, we report on the first growth of epitaxial FTO thin film by ultrasonic spray pyrolysis – a simple chemical deposition method – and we reveal the structure-property interplay by investigating in details its growth, morphology and strain/defects. Epitaxial FTO films are successfully grown on (110) rutile TiO2 single crystals and form mosaic domains with an out-of-plane distribution smaller than 0.5°, showing high structural quality comparable to epitaxial films prepared by molecular beam epitaxy and pulsed-laser deposition. Owing to the large lattice mismatch with rutile TiO2, the FTO film develops significant structural defects to release the epitaxial strain and is consequently nearly fully relaxed with a slight residual strain of 0.1–0.2%. With the help of an innovative nano-beam precession electron diffraction technique, the strain distribution is mapped at the TiO2/FTO interface, from which we identify the interfacial and secondary strain relaxation taking place mainly in the first 22 nm in the FTO film. The Hall-mobility of the epitaxial FTO films is close to the state-of-the-art and expected to improve further at lower doping concentrations. |
| Freie Schlagworte: | FTO, Epitaxy growth, Local strain distribution, Dislocations, Mobility |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Oberflächenforschung |
| Hinterlegungsdatum: | 09 Aug 2017 10:35 |
| Letzte Änderung: | 26 Jun 2018 12:13 |
| PPN: | |
| Sponsoren: | This work was supported by the European project IDS-FunMat and Agence Nationale de la Recherche (ANR, France) via the program CE05 INDEED (Project ID: ANR-15-CE05-0019)., David Muñoz-Rojas acknowledges funding through the Marie Curie Actions (FP7/2007-2013, Grant Agreement No.631111)., CEA-Grenoble thanks the FEI company and especially Max Otton and Mark Williamson for their helps. |
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