Quednau, S. ; Dassinger, F. ; Schlaak, Helmut F. (2014)
Growth In-Place Integration of Metallic Nanowires into MEMS Gas Flow Sensors.
ITG/GMA Symposium; Proceedings of Sensors and Measuring Systems 2014; 17.
Konferenzveröffentlichung, Bibliographie
Kurzbeschreibung (Abstract)
This work demonstrates a process for the in-place growth of metallic nanowires in microsystems. The wires are arranged in bunches, the so called nanowire arrays. The process expands the established ion track etch method and combines it with conventional MEMS technologies like photolithography. The process is described in detail and demonstrated by fabricating a calorimetric gas flow sensor with nanowire arrays. Two serially connected nanowire arrays are placed before and behind an electrically heated conductor on a glass substrate. The nanowire arrays work as fast temperature sensing elements to determine the gas flow over the sensor. The steady state sensor characteristics are measured, the time constant is estimated by a numerical simulation.
| Typ des Eintrags: | Konferenzveröffentlichung |
|---|---|
| Erschienen: | 2014 |
| Autor(en): | Quednau, S. ; Dassinger, F. ; Schlaak, Helmut F. |
| Art des Eintrags: | Bibliographie |
| Titel: | Growth In-Place Integration of Metallic Nanowires into MEMS Gas Flow Sensors |
| Sprache: | Deutsch |
| Publikationsjahr: | Juni 2014 |
| Veranstaltungstitel: | ITG/GMA Symposium; Proceedings of Sensors and Measuring Systems 2014; 17 |
| Kurzbeschreibung (Abstract): | This work demonstrates a process for the in-place growth of metallic nanowires in microsystems. The wires are arranged in bunches, the so called nanowire arrays. The process expands the established ion track etch method and combines it with conventional MEMS technologies like photolithography. The process is described in detail and demonstrated by fabricating a calorimetric gas flow sensor with nanowire arrays. Two serially connected nanowire arrays are placed before and behind an electrically heated conductor on a glass substrate. The nanowire arrays work as fast temperature sensing elements to determine the gas flow over the sensor. The steady state sensor characteristics are measured, the time constant is estimated by a numerical simulation. |
| Fachbereich(e)/-gebiet(e): | 18 Fachbereich Elektrotechnik und Informationstechnik > Institut für Elektromechanische Konstruktionen (aufgelöst 18.12.2018) 18 Fachbereich Elektrotechnik und Informationstechnik > Mikrotechnik und Elektromechanische Systeme 18 Fachbereich Elektrotechnik und Informationstechnik |
| Hinterlegungsdatum: | 09 Mär 2015 12:53 |
| Letzte Änderung: | 19 Apr 2016 08:46 |
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