Lukes, Sarah J. ; Lämmle, David ; Dickensheets, David L.
Hrsg.: Schenk, Harald ; SPIE (2010)
Surface micro-machined SU-8 2002 membrane mirrors for focus control.
San Francisco, California, United States (25.01.2010-27.01.2010)
Konferenzveröffentlichung, Bibliographie
Kurzbeschreibung (Abstract)
We have built 1 mm circular and 1 mm × 1.4 mm elliptical surface micro-machined SU-8 2002 deformable mirrors for focus control. The SU-8 2002 membrane layers are 2.25 μm thick with gold as the reflective coating on their surfaces. Three annular electrodes were used for electrostatic actuation. Stable deflection was observed up to 6.8 μm for a 1 mm × 1.4 mm elliptical mirror with an air gap of 14 μm. The frequency response of the membrane exhibited a 3 dB frequency larger than 10 kHz.
| Typ des Eintrags: | Konferenzveröffentlichung |
|---|---|
| Erschienen: | 2010 |
| Herausgeber: | Schenk, Harald |
| Autor(en): | Lukes, Sarah J. ; Lämmle, David ; Dickensheets, David L. |
| Art des Eintrags: | Bibliographie |
| Titel: | Surface micro-machined SU-8 2002 membrane mirrors for focus control |
| Sprache: | Englisch |
| Publikationsjahr: | 16 Februar 2010 |
| Ort: | San Francisco, California |
| Buchtitel: | Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940E |
| Veranstaltungsort: | San Francisco, California, United States |
| Veranstaltungsdatum: | 25.01.2010-27.01.2010 |
| Zugehörige Links: | |
| Kurzbeschreibung (Abstract): | We have built 1 mm circular and 1 mm × 1.4 mm elliptical surface micro-machined SU-8 2002 deformable mirrors for focus control. The SU-8 2002 membrane layers are 2.25 μm thick with gold as the reflective coating on their surfaces. Three annular electrodes were used for electrostatic actuation. Stable deflection was observed up to 6.8 μm for a 1 mm × 1.4 mm elliptical mirror with an air gap of 14 μm. The frequency response of the membrane exhibited a 3 dB frequency larger than 10 kHz. |
| Zusätzliche Informationen: | Author Affiliations: Sarah J. Lukes, David L. Dickensheets: Montana State Univ. (USA) David Lämmle: Albert-Ludwigs-Univ. Freiburg (Germany) |
| Fachbereich(e)/-gebiet(e): | Studienbereiche |
| Hinterlegungsdatum: | 02 Apr 2015 15:45 |
| Letzte Änderung: | 02 Apr 2015 15:45 |
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