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Structure and mechanical properties of silica doped zirconia thin films

Uhlmann, Ina and Hawelka, Dominik and Hildebrandt, Erwin and Pradella, Jens and Rödel, Jürgen (2013):
Structure and mechanical properties of silica doped zirconia thin films.
527, In: Thin Solid Films, Elsevier Science Publishing, pp. 200-204, ISSN 00406090, [Online-Edition: http://dx.doi.org/10.1016/j.tsf.2012.08.007],
[Article]

Abstract

Sol–gel based wear resistant coatings are presented as an alternative to existing vapor deposition coatings. The films consist of zirconia which has been doped with 8 wt.% silica. Crack-free single as well as multilayer coatings with thicknesses of 80 and 150 nm, respectively, could be produced after sintering at 1000 °C. The evolution of layer thickness, optical, chemical and mechanical properties during film annealing was investigated by ellipsometry, scanning electron microscopy, thermal gravimetric analysis, Fourier transform infrared spectroscopy, X-ray diffraction, nanoindentation and micro-abrasion. Micro-abrasion has been established as an easy and powerful tool to achieve first comparative abrasion data which could be correlated to hardness, Young's modulus and structure of the films. Above 600 °C a tetragonal, oxide coating with a Young's modulus ranging from 80 to 90 GPa, a hardness from 7 to 8 GPa and an increased abrasion resistance was obtained. The film density reached 4.64 g/cm3 with the mean refractive index n550 nm lying between 1.88 and 1.93.

Item Type: Article
Erschienen: 2013
Creators: Uhlmann, Ina and Hawelka, Dominik and Hildebrandt, Erwin and Pradella, Jens and Rödel, Jürgen
Title: Structure and mechanical properties of silica doped zirconia thin films
Language: English
Abstract:

Sol–gel based wear resistant coatings are presented as an alternative to existing vapor deposition coatings. The films consist of zirconia which has been doped with 8 wt.% silica. Crack-free single as well as multilayer coatings with thicknesses of 80 and 150 nm, respectively, could be produced after sintering at 1000 °C. The evolution of layer thickness, optical, chemical and mechanical properties during film annealing was investigated by ellipsometry, scanning electron microscopy, thermal gravimetric analysis, Fourier transform infrared spectroscopy, X-ray diffraction, nanoindentation and micro-abrasion. Micro-abrasion has been established as an easy and powerful tool to achieve first comparative abrasion data which could be correlated to hardness, Young's modulus and structure of the films. Above 600 °C a tetragonal, oxide coating with a Young's modulus ranging from 80 to 90 GPa, a hardness from 7 to 8 GPa and an increased abrasion resistance was obtained. The film density reached 4.64 g/cm3 with the mean refractive index n550 nm lying between 1.88 and 1.93.

Journal or Publication Title: Thin Solid Films
Volume: 527
Publisher: Elsevier Science Publishing
Uncontrolled Keywords: Sol–gel, ZrO2, SiO2, Wear, Hardness, Crystal structure, Micro abrasion, Ball cratering
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Advanced Thin Film Technology
11 Department of Materials and Earth Sciences > Material Science > Nonmetallic-Inorganic Materials
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 07 Feb 2014 10:21
Official URL: http://dx.doi.org/10.1016/j.tsf.2012.08.007
Identification Number: doi:10.1016/j.tsf.2012.08.007
Funders: This work was financially supported by the BMBF (Bundesministerium für Bildung und Forschung, Support Code 13N9661).
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