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Structure and mechanical properties of silica doped zirconia thin films

Uhlmann, Ina ; Hawelka, Dominik ; Hildebrandt, Erwin ; Pradella, Jens ; Rödel, Jürgen (2013)
Structure and mechanical properties of silica doped zirconia thin films.
In: Thin Solid Films, 527
doi: 10.1016/j.tsf.2012.08.007
Artikel, Bibliographie

Kurzbeschreibung (Abstract)

Sol–gel based wear resistant coatings are presented as an alternative to existing vapor deposition coatings. The films consist of zirconia which has been doped with 8 wt.% silica. Crack-free single as well as multilayer coatings with thicknesses of 80 and 150 nm, respectively, could be produced after sintering at 1000 °C. The evolution of layer thickness, optical, chemical and mechanical properties during film annealing was investigated by ellipsometry, scanning electron microscopy, thermal gravimetric analysis, Fourier transform infrared spectroscopy, X-ray diffraction, nanoindentation and micro-abrasion. Micro-abrasion has been established as an easy and powerful tool to achieve first comparative abrasion data which could be correlated to hardness, Young's modulus and structure of the films. Above 600 °C a tetragonal, oxide coating with a Young's modulus ranging from 80 to 90 GPa, a hardness from 7 to 8 GPa and an increased abrasion resistance was obtained. The film density reached 4.64 g/cm3 with the mean refractive index n550 nm lying between 1.88 and 1.93.

Typ des Eintrags: Artikel
Erschienen: 2013
Autor(en): Uhlmann, Ina ; Hawelka, Dominik ; Hildebrandt, Erwin ; Pradella, Jens ; Rödel, Jürgen
Art des Eintrags: Bibliographie
Titel: Structure and mechanical properties of silica doped zirconia thin films
Sprache: Englisch
Publikationsjahr: 1 Januar 2013
Verlag: Elsevier Science Publishing
Titel der Zeitschrift, Zeitung oder Schriftenreihe: Thin Solid Films
Jahrgang/Volume einer Zeitschrift: 527
DOI: 10.1016/j.tsf.2012.08.007
Kurzbeschreibung (Abstract):

Sol–gel based wear resistant coatings are presented as an alternative to existing vapor deposition coatings. The films consist of zirconia which has been doped with 8 wt.% silica. Crack-free single as well as multilayer coatings with thicknesses of 80 and 150 nm, respectively, could be produced after sintering at 1000 °C. The evolution of layer thickness, optical, chemical and mechanical properties during film annealing was investigated by ellipsometry, scanning electron microscopy, thermal gravimetric analysis, Fourier transform infrared spectroscopy, X-ray diffraction, nanoindentation and micro-abrasion. Micro-abrasion has been established as an easy and powerful tool to achieve first comparative abrasion data which could be correlated to hardness, Young's modulus and structure of the films. Above 600 °C a tetragonal, oxide coating with a Young's modulus ranging from 80 to 90 GPa, a hardness from 7 to 8 GPa and an increased abrasion resistance was obtained. The film density reached 4.64 g/cm3 with the mean refractive index n550 nm lying between 1.88 and 1.93.

Freie Schlagworte: Sol–gel, ZrO2, SiO2, Wear, Hardness, Crystal structure, Micro abrasion, Ball cratering
Fachbereich(e)/-gebiet(e): 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Dünne Schichten
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Nichtmetallisch-Anorganische Werkstoffe
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft
11 Fachbereich Material- und Geowissenschaften
Hinterlegungsdatum: 07 Feb 2014 10:21
Letzte Änderung: 07 Feb 2014 10:21
PPN:
Sponsoren: This work was financially supported by the BMBF (Bundesministerium für Bildung und Forschung, Support Code 13N9661).
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