Giere, A. ; Schafranek, R. ; Zheng, Y. ; Maune, H. ; Sazegar, M. ; Jakoby, Rolf ; Klein, Andreas (2008)
Characterization of Acoustic Effects in Ferroelectric Thin-Films for Microwave Components.
In: Frequenz, 62 (3-4)
doi: 10.1515/FREQ.2008.62.3-4.52
Artikel, Bibliographie
Dies ist die neueste Version dieses Eintrags.
Kurzbeschreibung (Abstract)
In this paper we present the impact of acoustic resonances excited by electrostriction in BST thin-films on the Q-factor of a varactor in the GHz range. By changing the process-parameter substrate to target distance while sputtering the thin-films, we observe a change in the acoustic resonance frequencies. To characterize the material properties which determine the acoustic resonance frequencies a model based on a 1D acoustic transmission line is used. The extracted material properties results in a proportional dependency to the changed process parameter. For verification of the acoustic transmission line model 3D simulations have been performed which show good agreement to the line model for lower resonance frequencies, where the difference at higher frequencies becomes significant due to additional higher order modes.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2008 |
| Autor(en): | Giere, A. ; Schafranek, R. ; Zheng, Y. ; Maune, H. ; Sazegar, M. ; Jakoby, Rolf ; Klein, Andreas |
| Art des Eintrags: | Bibliographie |
| Titel: | Characterization of Acoustic Effects in Ferroelectric Thin-Films for Microwave Components |
| Sprache: | Englisch |
| Publikationsjahr: | April 2008 |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Frequenz |
| Jahrgang/Volume einer Zeitschrift: | 62 |
| (Heft-)Nummer: | 3-4 |
| DOI: | 10.1515/FREQ.2008.62.3-4.52 |
| Zugehörige Links: | |
| Kurzbeschreibung (Abstract): | In this paper we present the impact of acoustic resonances excited by electrostriction in BST thin-films on the Q-factor of a varactor in the GHz range. By changing the process-parameter substrate to target distance while sputtering the thin-films, we observe a change in the acoustic resonance frequencies. To characterize the material properties which determine the acoustic resonance frequencies a model based on a 1D acoustic transmission line is used. The extracted material properties results in a proportional dependency to the changed process parameter. For verification of the acoustic transmission line model 3D simulations have been performed which show good agreement to the line model for lower resonance frequencies, where the difference at higher frequencies becomes significant due to additional higher order modes. |
| Freie Schlagworte: | Acoustic effects, modeling, thin-film, ferroelectric, characterization barium strontium titanate |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Oberflächenforschung 18 Fachbereich Elektrotechnik und Informationstechnik 18 Fachbereich Elektrotechnik und Informationstechnik > Institut für Mikrowellentechnik und Photonik (IMP) > Mikrowellentechnik 18 Fachbereich Elektrotechnik und Informationstechnik > Institut für Mikrowellentechnik und Photonik (IMP) |
| Hinterlegungsdatum: | 27 Jan 2012 15:19 |
| Letzte Änderung: | 03 Jul 2024 02:19 |
| PPN: | |
| Export: | |
| Suche nach Titel in: | TUfind oder in Google |
Verfügbare Versionen dieses Eintrags
-
Characterization of Acoustic Effects in Ferroelectric Thin-Films for Microwave Components. (deposited 30 Nov 2020 13:55)
- Characterization of Acoustic Effects in Ferroelectric Thin-Films for Microwave Components. (deposited 27 Jan 2012 15:19) [Gegenwärtig angezeigt]
 |
Frage zum Eintrag |
Optionen (nur für Redakteure)
 |
Redaktionelle Details anzeigen |
Drucken
Impressum