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Characterization of Acoustic Effects in Ferroelectric Thin-Films for Microwave Components

Giere, A. and Schafranek, Robert and Zheng, Yuliang and Maune, Holger and Sazegar, Mohsen and Jakoby, Rolf and Klein, Anja (2008):
Characterization of Acoustic Effects in Ferroelectric Thin-Films for Microwave Components. (Publisher's Version)
In: Frequenz, 62 (3-4), pp. 52-56. De Gruyter, ISSN 0016-1136,
DOI: 10.25534/tuprints-00013399,
[Article]

Abstract

In this paper we present the impact of acoustic resonances excited by electrostriction in BST thin-films on the Q-factor of a varactor in the GHz range. By changing the process-parameter substrate to target distance while sputtering the thin-films, we observe a change in the acoustic resonance frequencies. To characterize the material properties which determine the acoustic resonance frequencies a model based on a 1D acoustic transmission line is used. The extracted material properties results in a proportional dependency to the changed process parameter. For verification of the acoustic transmission line model 3D simulations have been performed which show good agreement to the line model for lower resonance frequencies, where the difference at higher frequencies becomes significant due to additional higher order modes.

Item Type: Article
Erschienen: 2008
Creators: Giere, A. and Schafranek, Robert and Zheng, Yuliang and Maune, Holger and Sazegar, Mohsen and Jakoby, Rolf and Klein, Anja
Origin: Secondary publication service
Status: Publisher's Version
Title: Characterization of Acoustic Effects in Ferroelectric Thin-Films for Microwave Components
Language: English
Abstract:

In this paper we present the impact of acoustic resonances excited by electrostriction in BST thin-films on the Q-factor of a varactor in the GHz range. By changing the process-parameter substrate to target distance while sputtering the thin-films, we observe a change in the acoustic resonance frequencies. To characterize the material properties which determine the acoustic resonance frequencies a model based on a 1D acoustic transmission line is used. The extracted material properties results in a proportional dependency to the changed process parameter. For verification of the acoustic transmission line model 3D simulations have been performed which show good agreement to the line model for lower resonance frequencies, where the difference at higher frequencies becomes significant due to additional higher order modes.

Journal or Publication Title: Frequenz
Journal volume: 62
Number: 3-4
Publisher: De Gruyter
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Surface Science
18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics > Microwave Engineering
18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics
Date Deposited: 30 Nov 2020 13:55
DOI: 10.25534/tuprints-00013399
Official URL: https://tuprints.ulb.tu-darmstadt.de/13399
URN: urn:nbn:de:tuda-tuprints-133993
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