Schlaak, Helmut F. (1999):
Mikrorelais in Silizium-Mikromechanik.
In: Optische und Elektronische Verbindungstechnik: Fachtagung der GMM <1999, München>; Tagungsbd., [Conference or Workshop Item]
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 1999 |
| Creators: | Schlaak, Helmut F. |
| Title: | Mikrorelais in Silizium-Mikromechanik |
| Language: | German |
| Series Name: | Optische und Elektronische Verbindungstechnik: Fachtagung der GMM <1999, München>; Tagungsbd. |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Microtechnology and Electromechanical Systems 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design (dissolved 18.12.2018) |
| Date Deposited: | 19 Nov 2008 16:00 |
| License: | [undefiniert] |
| Export: | |
| Suche nach Titel in: | TUfind oder in Google |
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