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Mikrorelais in Silizium-Mikromechanik

Schlaak, Helmut F. (1999):
Mikrorelais in Silizium-Mikromechanik.
In: Optische und Elektronische Verbindungstechnik: Fachtagung der GMM <1999, München>; Tagungsbd., [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 1999
Creators: Schlaak, Helmut F.
Title: Mikrorelais in Silizium-Mikromechanik
Language: German
Series Name: Optische und Elektronische Verbindungstechnik: Fachtagung der GMM <1999, München>; Tagungsbd.
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
Date Deposited: 19 Nov 2008 16:00
License: [undefiniert]
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