Lotz, Peter ; Matysek, Marc ; Schlaak, Helmut F. (2011)
Fabrication and Application of Miniaturized Dielectric Elastomer Stack Actuators.
In: IEEE/ASME Transactions on Mechatronics, 16 (1)
doi: 10.1109/TMECH.2010.2090164
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
In dielectric elastomer stack actuators (DEAs), the driving voltage is reduced using thin dielectric layers. They are efficiently fabricated in an automated process. To produce thin dielectric films, uncured polydimethylsiloxane (PDMS) is spun to a thickness below 100µm. After curing graphite, electrodes are sprayed on the PDMS surface and the next dielectric film can be applied on top. The main process steps are explained in detail. We show that the thickness variation within one layer is smaller than 4%. The electrodes are sprayed to have a sheet resistance of 10kOhm/sq. The technology presented here is able to produce DEAs with layer thicknesses down to 5µm. Hence, it is possible to design and fabricate actuators, which are driven only at 150V. Arrays of small actuators with a resolution of 1mm can be produced as well as single actuator elements with a diameter up to 40mm. Finally, the potential of this technology is demonstrated by two examples varying highly in their application. The first application is a vibrotactile display. It generates a perceptive vibration of 125Hz at a driving voltage of 600V. The second application is a peristaltic pump with a maximum flow rate of 12µl/min.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2011 |
| Autor(en): | Lotz, Peter ; Matysek, Marc ; Schlaak, Helmut F. |
| Art des Eintrags: | Bibliographie |
| Titel: | Fabrication and Application of Miniaturized Dielectric Elastomer Stack Actuators |
| Sprache: | Englisch |
| Publikationsjahr: | 2011 |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | IEEE/ASME Transactions on Mechatronics |
| Jahrgang/Volume einer Zeitschrift: | 16 |
| (Heft-)Nummer: | 1 |
| DOI: | 10.1109/TMECH.2010.2090164 |
| Kurzbeschreibung (Abstract): | In dielectric elastomer stack actuators (DEAs), the driving voltage is reduced using thin dielectric layers. They are efficiently fabricated in an automated process. To produce thin dielectric films, uncured polydimethylsiloxane (PDMS) is spun to a thickness below 100µm. After curing graphite, electrodes are sprayed on the PDMS surface and the next dielectric film can be applied on top. The main process steps are explained in detail. We show that the thickness variation within one layer is smaller than 4%. The electrodes are sprayed to have a sheet resistance of 10kOhm/sq. The technology presented here is able to produce DEAs with layer thicknesses down to 5µm. Hence, it is possible to design and fabricate actuators, which are driven only at 150V. Arrays of small actuators with a resolution of 1mm can be produced as well as single actuator elements with a diameter up to 40mm. Finally, the potential of this technology is demonstrated by two examples varying highly in their application. The first application is a vibrotactile display. It generates a perceptive vibration of 125Hz at a driving voltage of 600V. The second application is a peristaltic pump with a maximum flow rate of 12µl/min. |
| Fachbereich(e)/-gebiet(e): | 18 Fachbereich Elektrotechnik und Informationstechnik > Mikrotechnik und Elektromechanische Systeme 18 Fachbereich Elektrotechnik und Informationstechnik > Institut für Elektromechanische Konstruktionen (aufgelöst 18.12.2018) 18 Fachbereich Elektrotechnik und Informationstechnik |
| Hinterlegungsdatum: | 25 Jan 2011 07:46 |
| Letzte Änderung: | 19 Apr 2016 08:29 |
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