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Analytical characterization of BCxNy films generated by LPCVD with triethylamine borane

Baake, O. and Hoffmann, P. S. and Kosinova, M. L. and Klein, Andreas and Pollakowski, B. and Beckhoff, B. and Fainer, N. I. and Trunova, V. A. and Ensinger, W. :
Analytical characterization of BCxNy films generated by LPCVD with triethylamine borane.
[Online-Edition: http://www.springerlink.com/content/r7v273023pv54416/]
In: Analytical and Bioanalytical Chemistry, 398 (2) pp. 1077-1084.
[Article] , (2010)

Official URL: http://www.springerlink.com/content/r7v273023pv54416/

Abstract

Triethylamine borane (TEAB) and He, N2 or NH3 were applied as additional reaction gases in the production of BCxNy layers by low-pressure chemical vapor deposition (LPCVD). These layers were deposited on Si(100) wafers and characterized chemically by X-ray photoelectron spectroscopy (XPS) and synchrotron radiation-based total-reflection X-ray fluorescence analysis combined with near-edge X-ray absorption fine-structure spectroscopy (TXRF-NEXAFS). The composition of the material produced without NH3 was found to be dominated by B–C bonds with the stoichiometric formula B2C3N. B–N bonds with the formula B2CN3 were preferred when NH3 was added. A first attempt was made to compare the results obtained by applying trimethylamine borane and TEAB as single-source precursors.

Item Type: Article
Erschienen: 2010
Creators: Baake, O. and Hoffmann, P. S. and Kosinova, M. L. and Klein, Andreas and Pollakowski, B. and Beckhoff, B. and Fainer, N. I. and Trunova, V. A. and Ensinger, W.
Title: Analytical characterization of BCxNy films generated by LPCVD with triethylamine borane
Language: English
Abstract:

Triethylamine borane (TEAB) and He, N2 or NH3 were applied as additional reaction gases in the production of BCxNy layers by low-pressure chemical vapor deposition (LPCVD). These layers were deposited on Si(100) wafers and characterized chemically by X-ray photoelectron spectroscopy (XPS) and synchrotron radiation-based total-reflection X-ray fluorescence analysis combined with near-edge X-ray absorption fine-structure spectroscopy (TXRF-NEXAFS). The composition of the material produced without NH3 was found to be dominated by B–C bonds with the stoichiometric formula B2C3N. B–N bonds with the formula B2CN3 were preferred when NH3 was added. A first attempt was made to compare the results obtained by applying trimethylamine borane and TEAB as single-source precursors.

Journal or Publication Title: Analytical and Bioanalytical Chemistry
Volume: 398
Number: 2
Publisher: Springer-Verlag
Uncontrolled Keywords: LPCVD; Boron carbonitride films; XPS; TXRF-NEXAFS
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences > Material Science > Surface Science
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 06 Dec 2010 12:46
Official URL: http://www.springerlink.com/content/r7v273023pv54416/
Identification Number: doi:10.1007/s00216-010-3965-4
Funders: The authors acknowledge the financial support granted by the Deutsche Forschungsgemeinschaft for the research projects “Nanolayer Speciation” (EN 207/22-1, BE 1372/2-1) and “Chemical and Physical Characterization of Nanolayers” (EN 207/22-2, BE 1372/2-2)., The authors from the Russian Federation thank RFBR for grant 07-03-91555-NNIO.
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