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Two-dimensional X-ray waveguides: fabrication by wafer-bonding process and characterization

Kohlstedt, Anika and Kalbfleisch, S. and Dalditt, T. and Reiche, M. and Gösele, U. and Lima, E. and Willmott, P. (2008):
Two-dimensional X-ray waveguides: fabrication by wafer-bonding process and characterization.
In: Applied Physics A, Springer-Verlag, pp. 7-12, 91, (1), [Article]

Item Type: Article
Erschienen: 2008
Creators: Kohlstedt, Anika and Kalbfleisch, S. and Dalditt, T. and Reiche, M. and Gösele, U. and Lima, E. and Willmott, P.
Title: Two-dimensional X-ray waveguides: fabrication by wafer-bonding process and characterization
Language: English
Journal or Publication Title: Applied Physics A
Volume: 91
Number: 1
Publisher: Springer-Verlag
Divisions: 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design > Microtechnology and Electromechanical Systems
18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design
18 Department of Electrical Engineering and Information Technology
Date Deposited: 01 Nov 2010 15:19
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