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Planar coils with ferromagnetic yoke for a micromachined torque sensor

Rombach, Pirmin and Steiger, and Langheinrich, (1995):
Planar coils with ferromagnetic yoke for a micromachined torque sensor.
In: Journal of micromechanics and microengineering. 5 (1995), S. 136-138, [Article]

Item Type: Article
Erschienen: 1995
Creators: Rombach, Pirmin and Steiger, and Langheinrich,
Title: Planar coils with ferromagnetic yoke for a micromachined torque sensor
Language: English
Journal or Publication Title: Journal of micromechanics and microengineering. 5 (1995), S. 136-138
Divisions: 18 Department of Electrical Engineering and Information Technology
Date Deposited: 19 Nov 2008 15:58
License: [undefiniert]
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