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Planar coils with ferromagnetic yoke for a micromachined torque sensor

Rombach, Pirmin ; Steiger, H. ; Langheinrich, W. (1995):
Planar coils with ferromagnetic yoke for a micromachined torque sensor.
In: Journal of Micromechanics and Microengineering, 5, pp. 136-138. IOP Publishing Ltd, ISSN 0960-1317,
[Article]

Item Type: Article
Erschienen: 1995
Creators: Rombach, Pirmin ; Steiger, H. ; Langheinrich, W.
Title: Planar coils with ferromagnetic yoke for a micromachined torque sensor
Language: English
Journal or Publication Title: Journal of Micromechanics and Microengineering
Journal volume: 5
Publisher: IOP Publishing Ltd
Divisions: 18 Department of Electrical Engineering and Information Technology
Date Deposited: 19 Nov 2008 15:58
License: [undefiniert]
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