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Results on passivation of InP by photo-CVD SiO2 and SiNx obtained by using the low-frequency noise measurement technique

Gottwald, P. ; Kräutle, H. ; Szentpali, B. ; Hartnagel, H. L. (2001):
Results on passivation of InP by photo-CVD SiO2 and SiNx obtained by using the low-frequency noise measurement technique.
1, In: Fluctuation and noise letters, pp. S. L35-L43. [Article]

Item Type: Article
Erschienen: 2001
Creators: Gottwald, P. ; Kräutle, H. ; Szentpali, B. ; Hartnagel, H. L.
Title: Results on passivation of InP by photo-CVD SiO2 and SiNx obtained by using the low-frequency noise measurement technique
Language: English
Journal or Publication Title: Fluctuation and noise letters
Volume: 1
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 16:28
License: [undefiniert]
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