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Nanoparticle emission by electronic sputtering of CaF2 single crystals

Alencar, I. ; Hatori, M. ; Marmitt, G. G. ; Trombini, H. ; Grande, P. L. ; Dias, J. F. ; Papaléo, R. M. ; Mücklich, A. ; Assmann, W. ; Toulemonde, M. ; Trautmann, C. (2021)
Nanoparticle emission by electronic sputtering of CaF2 single crystals.
In: Applied Surface Science, 537
doi: 10.1016/j.apsusc.2020.147821
Artikel, Bibliographie

Kurzbeschreibung (Abstract)

Material sputtered from CaF2 single crystals by 180 MeV Au ions impinging at different incidence angles were collected on high-purity amorphous C-coated Cu grids and Si(1 0 0) wafer catcher surfaces over a broad angular range. These catcher surfaces were characterized complementary by transmission electron microscopy, atomic force microscopy and medium energy ion scattering, revealing the presence of a distribution of partially buried CaF2 nanoparticles in conjunction to a thin layer of deposited CaF2 material. Particle size distributions do not follow simple power laws and depend on the angles of ion incidence and particle detection. It is shown that the particle ejection is directly related to the jet-like component of sputtering, previously observed in ionic crystals, contributing significantly to the total yield. This contribution enhances as the impinging ions approach grazing incidence. Possible scenarios for the emission of particles are discussed in light of these observations.

Typ des Eintrags: Artikel
Erschienen: 2021
Autor(en): Alencar, I. ; Hatori, M. ; Marmitt, G. G. ; Trombini, H. ; Grande, P. L. ; Dias, J. F. ; Papaléo, R. M. ; Mücklich, A. ; Assmann, W. ; Toulemonde, M. ; Trautmann, C.
Art des Eintrags: Bibliographie
Titel: Nanoparticle emission by electronic sputtering of CaF2 single crystals
Sprache: Englisch
Publikationsjahr: 30 Januar 2021
Verlag: Elsevier
Titel der Zeitschrift, Zeitung oder Schriftenreihe: Applied Surface Science
Jahrgang/Volume einer Zeitschrift: 537
DOI: 10.1016/j.apsusc.2020.147821
Kurzbeschreibung (Abstract):

Material sputtered from CaF2 single crystals by 180 MeV Au ions impinging at different incidence angles were collected on high-purity amorphous C-coated Cu grids and Si(1 0 0) wafer catcher surfaces over a broad angular range. These catcher surfaces were characterized complementary by transmission electron microscopy, atomic force microscopy and medium energy ion scattering, revealing the presence of a distribution of partially buried CaF2 nanoparticles in conjunction to a thin layer of deposited CaF2 material. Particle size distributions do not follow simple power laws and depend on the angles of ion incidence and particle detection. It is shown that the particle ejection is directly related to the jet-like component of sputtering, previously observed in ionic crystals, contributing significantly to the total yield. This contribution enhances as the impinging ions approach grazing incidence. Possible scenarios for the emission of particles are discussed in light of these observations.

Freie Schlagworte: nanoparticle, swift heavy ions, electronic sputtering, catcher technique, transmission electron microscopy, atomic force microscopy, medium energy ion scattering
Zusätzliche Informationen:

Artikel-ID: 147821

Fachbereich(e)/-gebiet(e): 11 Fachbereich Material- und Geowissenschaften
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Ionenstrahlmodifizierte Materialien
Hinterlegungsdatum: 29 Feb 2024 08:00
Letzte Änderung: 29 Feb 2024 08:00
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