Ricohermoso, Emmanuel ; Klug, Florian ; Schlaak, Helmut F. ; Riedel, Ralf ; Ionescu, Emanuel (2022)
Electrically conductive silicon oxycarbide thin films prepared from preceramic polymers.
In: International Journal of Applied Ceramic Technology, 19 (1)
doi: 10.1111/ijac.13800
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
This work focuses on silicon oxycarbide thin film preparation and characterization. The Taguchi method of experimental design was used to optimize the process of film deposition. The prepared ceramic thin films with a thickness of c. 500 nm were characterized concerning their morphology, composition, and electrical properties. The molecular structure of the preceramic polymers used for the preparation of the ceramic thin films as well as the thermomechanical properties of the resulting SiOC significantly influenced the quality of the ceramic films. Thus, an increase in the content of carbon was found beneficial for the preparation of crack-free thin films. The obtained ceramic films exhibited increased electrical conductivity as compared to monolithic SiOC of similar chemical composition. This was shown to correlate with the unique hierarchical microstructure of the SiOC films, which contain large oxygen-depleted particles, mainly consisting of highly graphitized carbon and SiC, homogeneously dispersed in an oxygen-containing amorphous matrix. The matrix was shown to also contain free carbon and to contribute to charge carrier transport between the highly conductive large particles. The ceramic thin films possess electrical conductivities in the range from 5.4 to 8.8 S/cm and may be suitable for implementation in miniaturized piezoresistive strain gauges.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2022 |
| Autor(en): | Ricohermoso, Emmanuel ; Klug, Florian ; Schlaak, Helmut F. ; Riedel, Ralf ; Ionescu, Emanuel |
| Art des Eintrags: | Bibliographie |
| Titel: | Electrically conductive silicon oxycarbide thin films prepared from preceramic polymers |
| Sprache: | Englisch |
| Publikationsjahr: | Januar 2022 |
| Verlag: | Wiley |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | International Journal of Applied Ceramic Technology |
| Jahrgang/Volume einer Zeitschrift: | 19 |
| (Heft-)Nummer: | 1 |
| DOI: | 10.1111/ijac.13800 |
| Kurzbeschreibung (Abstract): | This work focuses on silicon oxycarbide thin film preparation and characterization. The Taguchi method of experimental design was used to optimize the process of film deposition. The prepared ceramic thin films with a thickness of c. 500 nm were characterized concerning their morphology, composition, and electrical properties. The molecular structure of the preceramic polymers used for the preparation of the ceramic thin films as well as the thermomechanical properties of the resulting SiOC significantly influenced the quality of the ceramic films. Thus, an increase in the content of carbon was found beneficial for the preparation of crack-free thin films. The obtained ceramic films exhibited increased electrical conductivity as compared to monolithic SiOC of similar chemical composition. This was shown to correlate with the unique hierarchical microstructure of the SiOC films, which contain large oxygen-depleted particles, mainly consisting of highly graphitized carbon and SiC, homogeneously dispersed in an oxygen-containing amorphous matrix. The matrix was shown to also contain free carbon and to contribute to charge carrier transport between the highly conductive large particles. The ceramic thin films possess electrical conductivities in the range from 5.4 to 8.8 S/cm and may be suitable for implementation in miniaturized piezoresistive strain gauges. |
| Freie Schlagworte: | Electrical conductivity, polymer-derived ceramics, thin film, raman-spectroscopy, ceramic nanocomposites, percolation-threshold, carbon, graphene, temperature, diamond, graphite, stress, dynamics |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Disperse Feststoffe 18 Fachbereich Elektrotechnik und Informationstechnik 18 Fachbereich Elektrotechnik und Informationstechnik > Mikrotechnik und Elektromechanische Systeme |
| TU-Projekte: | DFG|IO64/14-1|Heisenberg-Förderung |
| Hinterlegungsdatum: | 17 Dez 2021 08:01 |
| Letzte Änderung: | 17 Dez 2021 08:01 |
| PPN: | |
| Projekte: | German Research Foundation (DFG), Grant Number 411658150, German Research Foundation (DFG) European Commission, Grant Number IO 64/14-1 |
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