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3D simulation of thin film growth conditions at ion beam sputter deposition and comparison to experimental investigations

Tilsch, Markus ; Scheuer, V. ; Biersack, ; Tschudi, Theo (1996):
3D simulation of thin film growth conditions at ion beam sputter deposition and comparison to experimental investigations.
In: SPIE (Society for Photo-Optical Instrumentation Engineers) Proceedings. Vol. 2775 (1996), S. 585-593, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 1996
Creators: Tilsch, Markus ; Scheuer, V. ; Biersack, ; Tschudi, Theo
Title: 3D simulation of thin film growth conditions at ion beam sputter deposition and comparison to experimental investigations
Language: English
Series Name: SPIE (Society for Photo-Optical Instrumentation Engineers) Proceedings. Vol. 2775 (1996), S. 585-593
Divisions: 05 Department of Physics
Date Deposited: 19 Nov 2008 16:21
License: [undefiniert]
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