Englisch

Lattemann, M. ; Helmersson, U. ; Greene, J. E. (2010)
Fully dense, non-faceted 111-textured high power impulse magnetron sputtering TiN films grown in the absence of substrate heating and bias.
In: Thin Solid Films, 518 (21)
doi: 10.1016/j.tsf.2010.05.064
Artikel, Bibliographie