Savran, C. A. ; Sparks, A. W. ; Sihler, J. ; Li, Jian ; Wu, Wan-Chen ; Berlin, D. E. ; Burg, T. P. ; Fritz, J. ; Schmidt, M. A. ; Manalis, S. R. (2002)
Fabrication and characterization of a micromechanical sensor for differential detection of nanoscale motions.
In: Journal of Microelectromechanical Systems, 11 (6)
doi: 10.1109/JMEMS.2002.805057
Artikel, Bibliographie