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Properties of Zinc-containing Diamond-like Carbon Films Prepared by Plasma Source Ion Implantation

Hatada, Ruriko ; Flege, Stefan ; Rimmler, Berthold ; Ensinger, Wolfgang ; Baba, Koumei (2017)
Properties of Zinc-containing Diamond-like Carbon Films Prepared by Plasma Source Ion Implantation.
In: Transactions of the Materials Research Society of Japan, 42 (2)
doi: 10.14723/tmrsj.42.37
Article, Bibliographie

Abstract

Zinc-containing diamond-like carbon films were prepared by a combination of magnetron sputtering of a zinc target and plasma source ion implantation and deposition in a hydrocarbon atmosphere. The effect of the preparation conditions on the film properties, such as surface morphology, film structure, Zn content, hardness and friction coefficient, was evaluated. A wide range of Zn contents can be realized, with films becoming rougher and softer with increasing Zn content. The films possess remarkable Zn-rich features as observed in SEM images. Depending on the Zn concentration, the features evolve from dots into more network-like structures.

Item Type: Article
Erschienen: 2017
Creators: Hatada, Ruriko ; Flege, Stefan ; Rimmler, Berthold ; Ensinger, Wolfgang ; Baba, Koumei
Type of entry: Bibliographie
Title: Properties of Zinc-containing Diamond-like Carbon Films Prepared by Plasma Source Ion Implantation
Language: English
Date: 3 April 2017
Journal or Publication Title: Transactions of the Materials Research Society of Japan
Volume of the journal: 42
Issue Number: 2
DOI: 10.14723/tmrsj.42.37
URL / URN: https://doi.org/10.14723/tmrsj.42.37
Abstract:

Zinc-containing diamond-like carbon films were prepared by a combination of magnetron sputtering of a zinc target and plasma source ion implantation and deposition in a hydrocarbon atmosphere. The effect of the preparation conditions on the film properties, such as surface morphology, film structure, Zn content, hardness and friction coefficient, was evaluated. A wide range of Zn contents can be realized, with films becoming rougher and softer with increasing Zn content. The films possess remarkable Zn-rich features as observed in SEM images. Depending on the Zn concentration, the features evolve from dots into more network-like structures.

Uncontrolled Keywords: diamond-like carbon, plasma source ion implantation, surface morphology, friction coefficient
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Material Analytics
Date Deposited: 21 Jul 2017 08:53
Last Modified: 31 Jan 2019 06:58
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