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Plate-like glass structure for manufacturing pressure sensor, has recessed contour portion that is surrounded by planar edge area, and specific glass surface whose surface roughness value and diameter are set to predetermined ranges

Alff, Lambert ; Hildebrandt, Sandra ; Kober, Timo ; Teipen, R. ; Tham, A. T. ; Werthschützky, Roland (2013)
Plate-like glass structure for manufacturing pressure sensor, has recessed contour portion that is surrounded by planar edge area, and specific glass surface whose surface roughness value and diameter are set to predetermined ranges.
Norm, patent, standard, Bibliographie

Item Type: Norm, patent, standard
Erschienen: 2013
Creators: Alff, Lambert ; Hildebrandt, Sandra ; Kober, Timo ; Teipen, R. ; Tham, A. T. ; Werthschützky, Roland
Type of entry: Bibliographie
Title: Plate-like glass structure for manufacturing pressure sensor, has recessed contour portion that is surrounded by planar edge area, and specific glass surface whose surface roughness value and diameter are set to predetermined ranges
Language: English
Date: 2013
Patent number: DE 102011084457-A1, EP 2581722-A2
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Advanced Thin Film Technology
Date Deposited: 09 Jan 2014 10:00
Last Modified: 14 Dec 2020 08:19
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