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Preparation of Diamond-like Carbon Films by Plasma Source Ion Implantation with External Glow Discharge

Hatada, Ruriko ; Baba, Koumei ; Flege, Stefan ; Nakao, S. ; Ensinger, Wolfgang (2012)
Preparation of Diamond-like Carbon Films by Plasma Source Ion Implantation with External Glow Discharge.
In: Transactions of the Materials Research Society of Japan, 37 (2)
Article, Bibliographie

Item Type: Article
Erschienen: 2012
Creators: Hatada, Ruriko ; Baba, Koumei ; Flege, Stefan ; Nakao, S. ; Ensinger, Wolfgang
Type of entry: Bibliographie
Title: Preparation of Diamond-like Carbon Films by Plasma Source Ion Implantation with External Glow Discharge
Language: English
Date: June 2012
Publisher: The Materials Research Socitety of Japan
Journal or Publication Title: Transactions of the Materials Research Society of Japan
Volume of the journal: 37
Issue Number: 2
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Material Analytics
Date Deposited: 15 Dec 2012 15:35
Last Modified: 09 Jan 2019 13:06
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