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Fluorine and carbon ion implantation and deposition on metals by plasma source ion implantation

Flege, Stefan ; Hatada, Ruriko ; Baba, Koumei ; Ensinger, Wolfgang (2011)
Fluorine and carbon ion implantation and deposition on metals by plasma source ion implantation.
In: Surface and Coatings Technology, 206 (5)
Article, Bibliographie

Abstract

Deposition of fluorine containing diamond-like carbon films is an effective solution for the improvement of machine parts in an aggressive aqueous environment when the combination of a hydrophobic surface with good corrosion protection and low friction coefficients is required. Stainless steel and silicon were treated by plasma source ion implantation using the gases CF4, C6F6 and C6H5F, in the latter case with previous methane implantation. Depending on the plasma gas there are differences in the fluorine content, depth distribution, film thickness, water contact angle and friction coefficient.

Item Type: Article
Erschienen: 2011
Creators: Flege, Stefan ; Hatada, Ruriko ; Baba, Koumei ; Ensinger, Wolfgang
Type of entry: Bibliographie
Title: Fluorine and carbon ion implantation and deposition on metals by plasma source ion implantation
Language: English
Date: 25 November 2011
Publisher: Elsevier Science Publishing Company
Journal or Publication Title: Surface and Coatings Technology
Volume of the journal: 206
Issue Number: 5
URL / URN: http://www.sciencedirect.com/science/article/pii/S0257897211...
Abstract:

Deposition of fluorine containing diamond-like carbon films is an effective solution for the improvement of machine parts in an aggressive aqueous environment when the combination of a hydrophobic surface with good corrosion protection and low friction coefficients is required. Stainless steel and silicon were treated by plasma source ion implantation using the gases CF4, C6F6 and C6H5F, in the latter case with previous methane implantation. Depending on the plasma gas there are differences in the fluorine content, depth distribution, film thickness, water contact angle and friction coefficient.

Uncontrolled Keywords: Corrosion protection, Diamond-like carbon, Fluorine, Friction, Hydrophobic, Plasma source ion implantation
Additional Information:

Surface Modification of Materials by Ion beams 2009 — SMMIB 2009

Proceedings of the 16th International Conference on Surface Modification of Materials by Ion Beams

Divisions: 11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 18 Nov 2011 13:41
Last Modified: 05 Mar 2013 09:55
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