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Controlled fabrication of single-walled carbon nanotube electrodes by electron-beam-induced oxidation

Thiele, Cornelius ; Engel, Michael ; Hennrich, Frank ; Kappes, Manfred M. ; Johnsen, Klaus-Peter ; Frase, Carl G. ; Löhneysen, Hilbert v. ; Krupke, Ralph (2011)
Controlled fabrication of single-walled carbon nanotube electrodes by electron-beam-induced oxidation.
In: Applied Physics Letters, 99 (17)
doi: 10.1063/1.3656736
Article, Bibliographie

Abstract

The fabrication of metallic single-walled carbon nanotube electrodes separated by gaps of typically 20 nm width by electron-beam-induced oxidation is studied within an active device configuration. The tube conductance is measured continuously during the process. The experiment provides a statistical evaluation of gap sizes as well as the electron dose needed for gap formation. Also, the ability to precisely cut many carbon nanotubes in parallel is demonstrated. To show the practicality of the approach, devices of different scales were fabricated using sorted carbon nanotubes and dielectrophoretic deposition.

Item Type: Article
Erschienen: 2011
Creators: Thiele, Cornelius ; Engel, Michael ; Hennrich, Frank ; Kappes, Manfred M. ; Johnsen, Klaus-Peter ; Frase, Carl G. ; Löhneysen, Hilbert v. ; Krupke, Ralph
Type of entry: Bibliographie
Title: Controlled fabrication of single-walled carbon nanotube electrodes by electron-beam-induced oxidation
Language: English
Date: 24 October 2011
Journal or Publication Title: Applied Physics Letters
Volume of the journal: 99
Issue Number: 17
DOI: 10.1063/1.3656736
Abstract:

The fabrication of metallic single-walled carbon nanotube electrodes separated by gaps of typically 20 nm width by electron-beam-induced oxidation is studied within an active device configuration. The tube conductance is measured continuously during the process. The experiment provides a statistical evaluation of gap sizes as well as the electron dose needed for gap formation. Also, the ability to precisely cut many carbon nanotubes in parallel is demonstrated. To show the practicality of the approach, devices of different scales were fabricated using sorted carbon nanotubes and dielectrophoretic deposition.

Uncontrolled Keywords: carbon nanotubes, electrodeposition, electrodes, nanofabrication, pulsed laser deposition, vaporisation
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Fachgebiet Molekulare Nanostrukturen
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 08 Nov 2011 10:27
Last Modified: 05 Mar 2013 09:55
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