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An acceleration sensor in CMOS-compatible technology for integration in complex systems

Lang, Markus (1996)
An acceleration sensor in CMOS-compatible technology for integration in complex systems.
Conference or Workshop Item, Bibliographie

Item Type: Conference or Workshop Item
Erschienen: 1996
Creators: Lang, Markus
Type of entry: Bibliographie
Title: An acceleration sensor in CMOS-compatible technology for integration in complex systems
Language: English
Date: 1996
Series: Micromechanics Europe MME '96 <1996, Barcelona>: Proceedings
Divisions: 18 Department of Electrical Engineering and Information Technology
Date Deposited: 19 Nov 2008 16:00
Last Modified: 26 Aug 2018 21:21
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