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III-V Compound semiconductor micromachined actuators for long resonator tunable Fabry-Pérot detectors

Dehé, Alfons ; Peerlings, J. ; Pfeiffer, J. ; Riemenschneider, R. ; Vogt, A. ; Streubel, K. ; Künzel, H. ; Meißner, P. ; Hartnagel, H. L. (1998)
III-V Compound semiconductor micromachined actuators for long resonator tunable Fabry-Pérot detectors.
In: Sensors and Actuators A : Physical, 68 (1-3)
doi: 10.1016/S0924-4247(98)00071-5
Article, Bibliographie

Item Type: Article
Erschienen: 1998
Creators: Dehé, Alfons ; Peerlings, J. ; Pfeiffer, J. ; Riemenschneider, R. ; Vogt, A. ; Streubel, K. ; Künzel, H. ; Meißner, P. ; Hartnagel, H. L.
Type of entry: Bibliographie
Title: III-V Compound semiconductor micromachined actuators for long resonator tunable Fabry-Pérot detectors
Language: English
Date: 15 June 1998
Publisher: Elsevier
Journal or Publication Title: Sensors and Actuators A : Physical
Volume of the journal: 68
Issue Number: 1-3
DOI: 10.1016/S0924-4247(98)00071-5
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 16:29
Last Modified: 14 Jan 2022 11:46
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