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Boron carbonitride thin films by PACVD of single source precursors

Hegemann, Dirk ; Riedel, R. ; Dreßler, W. ; Oehr, C. ; Schindler, B. ; Brunner, H. (1997)
Boron carbonitride thin films by PACVD of single source precursors.
In: Chemical Vapor Deposition, 3 (5)
Article, Bibliographie

Item Type: Article
Erschienen: 1997
Creators: Hegemann, Dirk ; Riedel, R. ; Dreßler, W. ; Oehr, C. ; Schindler, B. ; Brunner, H.
Type of entry: Bibliographie
Title: Boron carbonitride thin films by PACVD of single source precursors
Language: English
Date: 1997
Publisher: WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Journal or Publication Title: Chemical Vapor Deposition
Volume of the journal: 3
Issue Number: 5
Corresponding Links:
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Dispersive Solids
11 Department of Materials and Earth Sciences > Department of Earth Sciences (1999 merged into Department of Materials and Earth Sciences)
Date Deposited: 19 Nov 2008 16:23
Last Modified: 07 Jan 2021 12:05
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