Hegemann, Dirk ; Riedel, R. ; Dreßler, W. ; Oehr, C. ; Schindler, B. ; Brunner, H. (1997):
Boron carbonitride thin films by PACVD of single source precursors.
In: Chemical Vapor Deposition, 3 (5), WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim, ISSN 0948-1907,
[Article]
| Item Type: | Article |
|---|---|
| Erschienen: | 1997 |
| Creators: | Hegemann, Dirk ; Riedel, R. ; Dreßler, W. ; Oehr, C. ; Schindler, B. ; Brunner, H. |
| Title: | Boron carbonitride thin films by PACVD of single source precursors |
| Language: | English |
| Journal or Publication Title: | Chemical Vapor Deposition |
| Volume of the journal: | 3 |
| Issue Number: | 5 |
| Publisher: | WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim |
| Divisions: | 11 Department of Materials and Earth Sciences 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences > Material Science > Dispersive Solids 11 Department of Materials and Earth Sciences > Department of Earth Sciences (1999 merged into Department of Materials and Earth Sciences) |
| Date Deposited: | 19 Nov 2008 16:23 |
| License: | [undefiniert] |
| PPN: | |
| Corresponding Links: | |
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