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Surface Structuring of Diamond-Like Carbon Films by Chemical Etching of Zinc Inclusions

Hatada, Ruriko ; Flege, Stefan ; Rimmler, Berthold ; Dietz, Christian ; Ensinger, Wolfgang ; Baba, Koumei (2019)
Surface Structuring of Diamond-Like Carbon Films by Chemical Etching of Zinc Inclusions.
In: Coatings, 9 (2)
doi: 10.3390/coatings9020125
Artikel, Bibliographie

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Kurzbeschreibung (Abstract)

A diamond-like carbon (DLC) film with a nanostructured surface can be produced in a two-step process. At first, a metal-containing DLC film is deposited. Here, the combination of plasma source ion implantation using a hydrocarbon gas and magnetron sputtering of a zinc target was used. Next, the metal particles within the surface are dissolved by an etchant (HNO3:H2O solution in this case). Since Zn particles in the surface of Zn-DLC films have a diameter of 100–200 nm, the resulting surface structures possess the same dimensions, thus covering a range that is accessible neither by mask deposition techniques nor by etching of other metal-containing DLC films, such as Cu-DLC. The surface morphology of the etched Zn-DLC films depends on the initial metal content of the film. With a low zinc concentration of about 10 at.%, separate holes are produced within the surface. Higher zinc concentrations (40 at.% or above) lead to a surface with an intrinsic roughness.

Typ des Eintrags: Artikel
Erschienen: 2019
Autor(en): Hatada, Ruriko ; Flege, Stefan ; Rimmler, Berthold ; Dietz, Christian ; Ensinger, Wolfgang ; Baba, Koumei
Art des Eintrags: Bibliographie
Titel: Surface Structuring of Diamond-Like Carbon Films by Chemical Etching of Zinc Inclusions
Sprache: Englisch
Publikationsjahr: 18 Februar 2019
Verlag: MDPI
Titel der Zeitschrift, Zeitung oder Schriftenreihe: Coatings
Jahrgang/Volume einer Zeitschrift: 9
(Heft-)Nummer: 2
DOI: 10.3390/coatings9020125
URL / URN: https://doi.org/10.3390/coatings9020125
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Kurzbeschreibung (Abstract):

A diamond-like carbon (DLC) film with a nanostructured surface can be produced in a two-step process. At first, a metal-containing DLC film is deposited. Here, the combination of plasma source ion implantation using a hydrocarbon gas and magnetron sputtering of a zinc target was used. Next, the metal particles within the surface are dissolved by an etchant (HNO3:H2O solution in this case). Since Zn particles in the surface of Zn-DLC films have a diameter of 100–200 nm, the resulting surface structures possess the same dimensions, thus covering a range that is accessible neither by mask deposition techniques nor by etching of other metal-containing DLC films, such as Cu-DLC. The surface morphology of the etched Zn-DLC films depends on the initial metal content of the film. With a low zinc concentration of about 10 at.%, separate holes are produced within the surface. Higher zinc concentrations (40 at.% or above) lead to a surface with an intrinsic roughness.

Freie Schlagworte: diamond-like carbon, surface morphology, deposition, metal, etching, dealloying, nanostructures
Fachbereich(e)/-gebiet(e): 11 Fachbereich Material- und Geowissenschaften
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Dünne Schichten
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Materialanalytik
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Physics of Surfaces
Hinterlegungsdatum: 14 Feb 2020 10:02
Letzte Änderung: 21 Nov 2023 07:13
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