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MEMS-Based sample carriers for simultaneous heating and biasing experiments: a platform for in-situ TEM analysis

Perez-Garza, Hector H. ; Pivak, Y. ; Molina-Luna, Leopoldo ; Omme, J. T. van ; Spruit, Ronald G. ; Sholkina, M. ; Pen, M. ; Xu, Q. (2017)
MEMS-Based sample carriers for simultaneous heating and biasing experiments: a platform for in-situ TEM analysis.
19th International Conference on Solid-State Sensors. Kaohsiung, Taiwan (8 - 22 June 2017)
doi: 10.1109/TRANSDUCERS.2017.7994502
Conference or Workshop Item, Bibliographie

Abstract

We present the development of a MEMS-based sample carrier to be used for in-situ studies inside the Transmission Electron Microscope (TEM). This MEMS device, referred to as the Nano-Chip, acts as a multifunctional sample carrier and micro-sized laboratory for simultaneous heating and biasing experiments. Each Nano-Chip consists of eight contacts, which enable four-point-probe measurements for both heating and biasing purposes. The microheater enables temperatures up to 800°C. Similarly, the system allows to apply up to 100V, which can result in electric fields as high as 200kV/cm. Samples are placed directly onto the electron transparent windows which allow for the electron beam to pass through for in-situ imaging. This system represents a cost-effective add-on to the TEM, which acts as the ideal tool for failure analysis of semiconductor materials, characterization of batteries, fuel cells and studies of structure responses to electric fields.

Item Type: Conference or Workshop Item
Erschienen: 2017
Creators: Perez-Garza, Hector H. ; Pivak, Y. ; Molina-Luna, Leopoldo ; Omme, J. T. van ; Spruit, Ronald G. ; Sholkina, M. ; Pen, M. ; Xu, Q.
Type of entry: Bibliographie
Title: MEMS-Based sample carriers for simultaneous heating and biasing experiments: a platform for in-situ TEM analysis
Language: English
Date: 18 June 2017
Place of Publication: PISCATAWAY, NJ
Publisher: IEEE
Journal or Publication Title: Transducers
Book Title: IEEE sensors letters Institute of Electrical and Electronics Engineers
Event Title: 19th International Conference on Solid-State Sensors
Event Location: Kaohsiung, Taiwan
Event Dates: 8 - 22 June 2017
DOI: 10.1109/TRANSDUCERS.2017.7994502
Abstract:

We present the development of a MEMS-based sample carrier to be used for in-situ studies inside the Transmission Electron Microscope (TEM). This MEMS device, referred to as the Nano-Chip, acts as a multifunctional sample carrier and micro-sized laboratory for simultaneous heating and biasing experiments. Each Nano-Chip consists of eight contacts, which enable four-point-probe measurements for both heating and biasing purposes. The microheater enables temperatures up to 800°C. Similarly, the system allows to apply up to 100V, which can result in electric fields as high as 200kV/cm. Samples are placed directly onto the electron transparent windows which allow for the electron beam to pass through for in-situ imaging. This system represents a cost-effective add-on to the TEM, which acts as the ideal tool for failure analysis of semiconductor materials, characterization of batteries, fuel cells and studies of structure responses to electric fields.

Uncontrolled Keywords: MEMS, heating, biasing, in-situ, TEM
Identification Number: Electronic ISSN: 2167-0021
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Advanced Electron Microscopy (aem)
Date Deposited: 06 Dec 2018 10:17
Last Modified: 17 Aug 2021 07:39
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