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Wet-chemical etching of SrMoO3 thin films

Mani, Arzhang and Nikfalazar, M. and Muench, Falk and Radetinac, Aldin and Zheng, Y. and Wiens, A. and Melnyk, S. and Maune, H. and Alff, Lambert and Jakoby, R. and Komissinskiy, Philipp (2016):
Wet-chemical etching of SrMoO3 thin films.
In: Materials Letters, Elsevier Science Publishing, pp. 173-176, 184, ISSN 0167577X, [Online-Edition: http://doi.org/10.1016/j.matlet.2016.08.038],
[Article]

Abstract

SrMoO3 is a perovskite oxide material with very high electrical conductivity, exhibiting great potential for integration into electronic devices. Here, we present a method for controlled wet-chemical etching of SrMoO3 thin films using alkaline solutions. The etching process includes superficial oxidation of the Mo4+ of the SrMoO3 to Mo6+ followed by solvation of the molybdate and strontium ions. The SrMoO3 etching rate can be widely tuned by adjusting the amount of the oxidizing additives in the solution.

Item Type: Article
Erschienen: 2016
Creators: Mani, Arzhang and Nikfalazar, M. and Muench, Falk and Radetinac, Aldin and Zheng, Y. and Wiens, A. and Melnyk, S. and Maune, H. and Alff, Lambert and Jakoby, R. and Komissinskiy, Philipp
Title: Wet-chemical etching of SrMoO3 thin films
Language: English
Abstract:

SrMoO3 is a perovskite oxide material with very high electrical conductivity, exhibiting great potential for integration into electronic devices. Here, we present a method for controlled wet-chemical etching of SrMoO3 thin films using alkaline solutions. The etching process includes superficial oxidation of the Mo4+ of the SrMoO3 to Mo6+ followed by solvation of the molybdate and strontium ions. The SrMoO3 etching rate can be widely tuned by adjusting the amount of the oxidizing additives in the solution.

Journal or Publication Title: Materials Letters
Volume: 184
Publisher: Elsevier Science Publishing
Uncontrolled Keywords: SrMoO3, Molybdate, Thin films, Wet chemical etching, Electronic materials
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Advanced Thin Film Technology
11 Department of Materials and Earth Sciences > Material Science > Material Analytics
18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics > Microwave Engineering
18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics
Date Deposited: 18 May 2017 08:21
Official URL: http://doi.org/10.1016/j.matlet.2016.08.038
Identification Number: doi:10.1016/j.matlet.2016.08.038
Funders: This work was supported by the German DFG within KO 4093/1-1 and JA 921/31-1.
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