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An acceleration sensor in cmos-compatible technology for integration in complex systems

Lang, Markus (1997):
An acceleration sensor in cmos-compatible technology for integration in complex systems.
In: Journal of micromechanics and microengineering. 7 (1997), 3, S. 193-195, [Article]

Item Type: Article
Erschienen: 1997
Creators: Lang, Markus
Title: An acceleration sensor in cmos-compatible technology for integration in complex systems
Language: English
Journal or Publication Title: Journal of micromechanics and microengineering. 7 (1997), 3, S. 193-195
Divisions: 18 Department of Electrical Engineering and Information Technology
Date Deposited: 19 Nov 2008 16:04
License: [undefiniert]
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