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Complete coating of metal rings by ion beam sputtering of a W-shaped concave target with a broad-beam ion source

Ayata, Sevda and Baba, Koumei and Ensinger, Wolfgang (2016):
Complete coating of metal rings by ion beam sputtering of a W-shaped concave target with a broad-beam ion source.
In: Surface & coatings technology, pp. 62-66, 294, ISSN 0257-8972, [Online-Edition: http://dx.doi.org/10.1016/j.surfcoat.2016.03.065],
[Article]

Abstract

Ion beam sputter coating with the substrate at ambient temperature or water-cooled is a well-known process for coating temperature-sensitive substrates with films of high quality, despite the low process temperature. However, ion beam based methods suffer from an intrinsic drawback, the so-called line-of-sight restriction. Since a directed beam of the material to be deposited is used, only that part of a sample that is “seen” by the particle source is properly treated. This renders coating of 3-dimensional objects with ion beam methods difficult. Particularly challenging is to completely coat such objects from all sides. A typical example are rings. When they are to be treated with ion beam techniques, sophisticated manipulation of substrate or ion beam or even both is required. Despite these problems, under certain circumstances it is nevertheless possible to apply ion beam techniques for treating/coating 3-D objects. When ion beam sputter coating is used, the sputter target, i.e. the source of the material to be deposited, is usually flat. With such a sputter target, a ring can hardly be coated uniformly. However, when the sputter target is formed according to the substrate shape, here as a concave/convex double-cone, a very effective coating can be achieved. This is demonstrated by coating rings for corrosion protection.

Item Type: Article
Erschienen: 2016
Creators: Ayata, Sevda and Baba, Koumei and Ensinger, Wolfgang
Title: Complete coating of metal rings by ion beam sputtering of a W-shaped concave target with a broad-beam ion source
Language: English
Abstract:

Ion beam sputter coating with the substrate at ambient temperature or water-cooled is a well-known process for coating temperature-sensitive substrates with films of high quality, despite the low process temperature. However, ion beam based methods suffer from an intrinsic drawback, the so-called line-of-sight restriction. Since a directed beam of the material to be deposited is used, only that part of a sample that is “seen” by the particle source is properly treated. This renders coating of 3-dimensional objects with ion beam methods difficult. Particularly challenging is to completely coat such objects from all sides. A typical example are rings. When they are to be treated with ion beam techniques, sophisticated manipulation of substrate or ion beam or even both is required. Despite these problems, under certain circumstances it is nevertheless possible to apply ion beam techniques for treating/coating 3-D objects. When ion beam sputter coating is used, the sputter target, i.e. the source of the material to be deposited, is usually flat. With such a sputter target, a ring can hardly be coated uniformly. However, when the sputter target is formed according to the substrate shape, here as a concave/convex double-cone, a very effective coating can be achieved. This is demonstrated by coating rings for corrosion protection.

Journal or Publication Title: Surface & coatings technology
Volume: 294
Uncontrolled Keywords: Ion beam sputter deposition, Ring coating, Corrosion, Three-dimensional sputter target
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Material Analytics
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 06 Jun 2016 11:59
Official URL: http://dx.doi.org/10.1016/j.surfcoat.2016.03.065
Identification Number: doi:10.1016/j.surfcoat.2016.03.065
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