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Numerical Simulations and Microfabrication of a Multifunctional AFM-SNOM-Sensor

Serwatzy, C. and Abraham, M. and Drews, D. and Ehrfeld, W. and Mayr, K. and Noell, W. and Marti, O. and Hollricher, O. and Hahne, Peter and Ehmann, Ralf (1997):
Numerical Simulations and Microfabrication of a Multifunctional AFM-SNOM-Sensor.
In: PTB-Report F30 Quantitative Microscopy (QM97), pp. 18-23, [Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 1997
Creators: Serwatzy, C. and Abraham, M. and Drews, D. and Ehrfeld, W. and Mayr, K. and Noell, W. and Marti, O. and Hollricher, O. and Hahne, Peter and Ehmann, Ralf
Title: Numerical Simulations and Microfabrication of a Multifunctional AFM-SNOM-Sensor
Language: English
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute of Electromagnetic Field Theory (from 01.01.2019 renamed Institute for Accelerator Science and Electromagnetic Fields)
Event Title: PTB-Report F30 Quantitative Microscopy (QM97)
Date Deposited: 14 Mar 2016 16:31
Additional Information:

TEMF-Pub-DB TEMF000253

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