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Femtosecond laser ablation-based mass spectrometry: An ideal tool for stoichiometric analysis of thin films

LaHaye, Nicole L. and Kurian, Jose and Diwakar, Prasoon K. and Alff, Lambert and Harilal, Sivanandan S. (2015):
Femtosecond laser ablation-based mass spectrometry: An ideal tool for stoichiometric analysis of thin films.
In: Scientific Reports, Nature, p. 13121, 5, ISSN 2045-2322,
[Online-Edition: http://dx.doi.org/10.1038/srep13121],
[Article]

Abstract

An accurate and routinely available method for stoichiometric analysis of thin films is a desideratum of modern materials science where a material’s properties depend sensitively on elemental composition. We thoroughly investigated femtosecond laser ablation-inductively coupled plasma-mass spectrometry (fs-LA-ICP-MS) as an analytical technique for determination of the stoichiometry of thin films down to the nanometer scale. The use of femtosecond laser ablation allows for precise removal of material with high spatial and depth resolution that can be coupled to an ICP-MS to obtain elemental and isotopic information. We used molecular beam epitaxy-grown thin films of LaPd(x)Sb2 and T′-La2CuO4 to demonstrate the capacity of fs-LA-ICP-MS for stoichiometric analysis and the spatial and depth resolution of the technique. Here we demonstrate that the stoichiometric information of thin films with a thickness of ~10 nm or lower can be determined. Furthermore, our results indicate that fs-LA-ICP-MS provides precise information on the thin film-substrate interface and is able to detect the interdiffusion of cations.

Item Type: Article
Erschienen: 2015
Creators: LaHaye, Nicole L. and Kurian, Jose and Diwakar, Prasoon K. and Alff, Lambert and Harilal, Sivanandan S.
Title: Femtosecond laser ablation-based mass spectrometry: An ideal tool for stoichiometric analysis of thin films
Language: English
Abstract:

An accurate and routinely available method for stoichiometric analysis of thin films is a desideratum of modern materials science where a material’s properties depend sensitively on elemental composition. We thoroughly investigated femtosecond laser ablation-inductively coupled plasma-mass spectrometry (fs-LA-ICP-MS) as an analytical technique for determination of the stoichiometry of thin films down to the nanometer scale. The use of femtosecond laser ablation allows for precise removal of material with high spatial and depth resolution that can be coupled to an ICP-MS to obtain elemental and isotopic information. We used molecular beam epitaxy-grown thin films of LaPd(x)Sb2 and T′-La2CuO4 to demonstrate the capacity of fs-LA-ICP-MS for stoichiometric analysis and the spatial and depth resolution of the technique. Here we demonstrate that the stoichiometric information of thin films with a thickness of ~10 nm or lower can be determined. Furthermore, our results indicate that fs-LA-ICP-MS provides precise information on the thin film-substrate interface and is able to detect the interdiffusion of cations.

Journal or Publication Title: Scientific Reports
Volume: 5
Publisher: Nature
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Advanced Thin Film Technology
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 09 Oct 2015 08:42
Official URL: http://dx.doi.org/10.1038/srep13121
Identification Number: doi:10.1038/srep13121
Funders: This work was supported in part by DOE/NNSA Office of Nonproliferation and Verification Research and Development (NA-22), the Laboratory Directed Research and Development (LDRD) Program of PNNL and the U.S. National Science Foundation., Pacific Northwest National Laboratory is operated for the U.S. Department of Energy by the Battelle Memorial Institute under Contract No. DE-AC05-76RLO1830.
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