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TiO₂, SiO₂, and Al₂O₃ coated nanopores and nanotubes produced by ALD in etched ion-track membranes for transport measurements

Spende, Anne ; Sobel, Nicolas ; Lukas, Manuela ; Zierold, Robert ; Riedl, Jesse C. ; Gura, Leonard ; Schubert, Ina ; Moreno, Josep M. Montero ; Nielsch, Kornelius ; Stühn, B. ; Hess, Christian ; Trautmann, Christina ; Toimil-Molares, Maria E. (2015)
TiO₂, SiO₂, and Al₂O₃ coated nanopores and nanotubes produced by ALD in etched ion-track membranes for transport measurements.
In: Nanotechnology, 26 (33)
doi: 10.1088/0957-4484/26/33/335301
Artikel, Bibliographie

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Kurzbeschreibung (Abstract)

Low-temperature atomic layer deposition (ALD) of TiO₂, SiO₂, and Al₂O₃ was applied to modify the surface and to tailor the diameter of nanochannels in etched ion-track polycarbonate membranes. The homogeneity, conformity, and composition of the coating inside the nanochannels are investigated for different channel diameters (18–55 nm) and film thicknesses (5–22 nm). Small angle x-ray scattering before and after ALD demonstrates conformal coating along the full channel length. X-ray photoelectron spectroscopy and energy dispersive x-ray spectroscopy provide evidence of nearly stoichiometric composition of the different coatings. By wet-chemical methods, the ALD-deposited film is released from the supporting polymer templates providing 30 μm long self-supporting nanotubes with walls as thin as 5 nm. Electrolytic ion-conductivity measurements provide proof-of-concept that combining ALD coating with ion-track nanotechnology offers promising perspectives for single-pore applications by controlled shrinking of an oversized pore to a preferred smaller diameter and fine-tuning of the chemical and physical nature of the inner channel surface.

Typ des Eintrags: Artikel
Erschienen: 2015
Autor(en): Spende, Anne ; Sobel, Nicolas ; Lukas, Manuela ; Zierold, Robert ; Riedl, Jesse C. ; Gura, Leonard ; Schubert, Ina ; Moreno, Josep M. Montero ; Nielsch, Kornelius ; Stühn, B. ; Hess, Christian ; Trautmann, Christina ; Toimil-Molares, Maria E.
Art des Eintrags: Bibliographie
Titel: TiO₂, SiO₂, and Al₂O₃ coated nanopores and nanotubes produced by ALD in etched ion-track membranes for transport measurements
Sprache: Englisch
Publikationsjahr: 2015
Ort: Bristol
Verlag: IOP Science
Titel der Zeitschrift, Zeitung oder Schriftenreihe: Nanotechnology
Jahrgang/Volume einer Zeitschrift: 26
(Heft-)Nummer: 33
DOI: 10.1088/0957-4484/26/33/335301
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Kurzbeschreibung (Abstract):

Low-temperature atomic layer deposition (ALD) of TiO₂, SiO₂, and Al₂O₃ was applied to modify the surface and to tailor the diameter of nanochannels in etched ion-track polycarbonate membranes. The homogeneity, conformity, and composition of the coating inside the nanochannels are investigated for different channel diameters (18–55 nm) and film thicknesses (5–22 nm). Small angle x-ray scattering before and after ALD demonstrates conformal coating along the full channel length. X-ray photoelectron spectroscopy and energy dispersive x-ray spectroscopy provide evidence of nearly stoichiometric composition of the different coatings. By wet-chemical methods, the ALD-deposited film is released from the supporting polymer templates providing 30 μm long self-supporting nanotubes with walls as thin as 5 nm. Electrolytic ion-conductivity measurements provide proof-of-concept that combining ALD coating with ion-track nanotechnology offers promising perspectives for single-pore applications by controlled shrinking of an oversized pore to a preferred smaller diameter and fine-tuning of the chemical and physical nature of the inner channel surface.

Fachbereich(e)/-gebiet(e): 11 Fachbereich Material- und Geowissenschaften
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Ionenstrahlmodifizierte Materialien
05 Fachbereich Physik
05 Fachbereich Physik > Institut für Festkörperphysik (2021 umbenannt in Institut für Physik Kondensierter Materie (IPKM))
07 Fachbereich Chemie
07 Fachbereich Chemie > Eduard Zintl-Institut
07 Fachbereich Chemie > Eduard Zintl-Institut > Fachgebiet Physikalische Chemie
Hinterlegungsdatum: 25 Aug 2015 08:22
Letzte Änderung: 15 Mär 2024 08:50
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