Spende, Anne ; Sobel, Nicolas ; Lukas, Manuela ; Zierold, Robert ; Riedl, Jesse C. ; Gura, Leonard ; Schubert, Ina ; Moreno, Josep M. Montero ; Nielsch, Kornelius ; Stühn, B. ; Hess, Christian ; Trautmann, Christina ; Toimil-Molares, Maria E. (2015)
TiO₂, SiO₂, and Al₂O₃ coated nanopores and nanotubes produced by ALD in etched ion-track membranes for transport measurements.
In: Nanotechnology, 26 (33)
doi: 10.1088/0957-4484/26/33/335301
Artikel, Bibliographie
Dies ist die neueste Version dieses Eintrags.
Kurzbeschreibung (Abstract)
Low-temperature atomic layer deposition (ALD) of TiO₂, SiO₂, and Al₂O₃ was applied to modify the surface and to tailor the diameter of nanochannels in etched ion-track polycarbonate membranes. The homogeneity, conformity, and composition of the coating inside the nanochannels are investigated for different channel diameters (18–55 nm) and film thicknesses (5–22 nm). Small angle x-ray scattering before and after ALD demonstrates conformal coating along the full channel length. X-ray photoelectron spectroscopy and energy dispersive x-ray spectroscopy provide evidence of nearly stoichiometric composition of the different coatings. By wet-chemical methods, the ALD-deposited film is released from the supporting polymer templates providing 30 μm long self-supporting nanotubes with walls as thin as 5 nm. Electrolytic ion-conductivity measurements provide proof-of-concept that combining ALD coating with ion-track nanotechnology offers promising perspectives for single-pore applications by controlled shrinking of an oversized pore to a preferred smaller diameter and fine-tuning of the chemical and physical nature of the inner channel surface.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2015 |
| Autor(en): | Spende, Anne ; Sobel, Nicolas ; Lukas, Manuela ; Zierold, Robert ; Riedl, Jesse C. ; Gura, Leonard ; Schubert, Ina ; Moreno, Josep M. Montero ; Nielsch, Kornelius ; Stühn, B. ; Hess, Christian ; Trautmann, Christina ; Toimil-Molares, Maria E. |
| Art des Eintrags: | Bibliographie |
| Titel: | TiO₂, SiO₂, and Al₂O₃ coated nanopores and nanotubes produced by ALD in etched ion-track membranes for transport measurements |
| Sprache: | Englisch |
| Publikationsjahr: | 2015 |
| Ort: | Bristol |
| Verlag: | IOP Science |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Nanotechnology |
| Jahrgang/Volume einer Zeitschrift: | 26 |
| (Heft-)Nummer: | 33 |
| DOI: | 10.1088/0957-4484/26/33/335301 |
| Zugehörige Links: | |
| Kurzbeschreibung (Abstract): | Low-temperature atomic layer deposition (ALD) of TiO₂, SiO₂, and Al₂O₃ was applied to modify the surface and to tailor the diameter of nanochannels in etched ion-track polycarbonate membranes. The homogeneity, conformity, and composition of the coating inside the nanochannels are investigated for different channel diameters (18–55 nm) and film thicknesses (5–22 nm). Small angle x-ray scattering before and after ALD demonstrates conformal coating along the full channel length. X-ray photoelectron spectroscopy and energy dispersive x-ray spectroscopy provide evidence of nearly stoichiometric composition of the different coatings. By wet-chemical methods, the ALD-deposited film is released from the supporting polymer templates providing 30 μm long self-supporting nanotubes with walls as thin as 5 nm. Electrolytic ion-conductivity measurements provide proof-of-concept that combining ALD coating with ion-track nanotechnology offers promising perspectives for single-pore applications by controlled shrinking of an oversized pore to a preferred smaller diameter and fine-tuning of the chemical and physical nature of the inner channel surface. |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Ionenstrahlmodifizierte Materialien 05 Fachbereich Physik 05 Fachbereich Physik > Institut für Festkörperphysik (2021 umbenannt in Institut für Physik Kondensierter Materie (IPKM)) 07 Fachbereich Chemie 07 Fachbereich Chemie > Eduard Zintl-Institut 07 Fachbereich Chemie > Eduard Zintl-Institut > Fachgebiet Physikalische Chemie |
| Hinterlegungsdatum: | 25 Aug 2015 08:22 |
| Letzte Änderung: | 15 Mär 2024 08:50 |
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| Suche nach Titel in: | TUfind oder in Google |
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TiO₂, SiO₂, and Al₂O₃ coated nanopores and nanotubes produced by ALD in etched ion-track membranes for transport measurements. (deposited 09 Jan 2024 10:29)
- TiO₂, SiO₂, and Al₂O₃ coated nanopores and nanotubes produced by ALD in etched ion-track membranes for transport measurements. (deposited 25 Aug 2015 08:22) [Gegenwärtig angezeigt]
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