TU Darmstadt / ULB / TUbiblio

Conformal SiO2 coating of sub-100 nm diameter channels of polycarbonate etched ion-track channels by atomic layer deposition

Sobel, Nicolas and Hess, Christian and Lukas, Manuela and Spende, Anne and Stühn, B. and Toimil-Molares, M. E. and Trautmann, Christina (2015):
Conformal SiO2 coating of sub-100 nm diameter channels of polycarbonate etched ion-track channels by atomic layer deposition.
6, In: Beilstein Journal of Nanotechnology, pp. 472-479, ISSN 2190-4286, [Online-Edition: http://dx.doi.org/10.3762/bjnano.6.48],
[Article]

Item Type: Article
Erschienen: 2015
Creators: Sobel, Nicolas and Hess, Christian and Lukas, Manuela and Spende, Anne and Stühn, B. and Toimil-Molares, M. E. and Trautmann, Christina
Title: Conformal SiO2 coating of sub-100 nm diameter channels of polycarbonate etched ion-track channels by atomic layer deposition
Language: English
Journal or Publication Title: Beilstein Journal of Nanotechnology
Volume: 6
Divisions: 05 Department of Physics
05 Department of Physics > Institute for condensed matter physics
05 Department of Physics > Institute for condensed matter physics > Experimental Condensed Matter Physics
07 Department of Chemistry
07 Department of Chemistry > Physical Chemistry
Date Deposited: 22 Jul 2015 06:46
Official URL: http://dx.doi.org/10.3762/bjnano.6.48
Identification Number: doi:10.3762/bjnano.6.48
Export:
Suche nach Titel in: TUfind oder in Google
Send an inquiry Send an inquiry

Options (only for editors)

View Item View Item