Hoffmann, Peter ; Kosinova, M. ; Flege, Stefan ; Brötz, Joachim ; Trunova, V. ; Dietz, Christian ; Ensinger, Wolfgang (2015)
Chemical and physical properties in layers and interfaces of nanolayered Si(100)/Ni/BCxNy stacks.
In: X-Ray Spectrometry, 44 (2)
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
Layered stacks of the structure Si(100)/Ni/BCxNy were produced by physical (Ni) and chemical (BCN) vapor deposition. The BCN layers were deposited at temperatures of 200, 300, 400, and 500 °C. The resulting samples were characterized by ellipsometry, X-ray photoelectron spectrometry, secondary ion mass spectrometry, atomic force microscopy, and X-ray reflectometry. The formed structures of the samples synthesized at 200 and 500 °C, respectively, were determined. For the synthesis temperature of 200 °C, compounds with Ni-C bonds were found at the interface Ni/BCxNy. For the sample produced at 500 °C, compounds with Ni-Si bonds were identified, dispersed as particles or droplets in the corresponding interface. Copyright © 2015 John Wiley & Sons, Ltd.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2015 |
| Autor(en): | Hoffmann, Peter ; Kosinova, M. ; Flege, Stefan ; Brötz, Joachim ; Trunova, V. ; Dietz, Christian ; Ensinger, Wolfgang |
| Art des Eintrags: | Bibliographie |
| Titel: | Chemical and physical properties in layers and interfaces of nanolayered Si(100)/Ni/BCxNy stacks |
| Sprache: | Englisch |
| Publikationsjahr: | März 2015 |
| Verlag: | WILEY-VCH Verlag GmbH & Co. KGaA |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | X-Ray Spectrometry |
| Jahrgang/Volume einer Zeitschrift: | 44 |
| (Heft-)Nummer: | 2 |
| URL / URN: | http://onlinelibrary.wiley.com/doi/10.1002/xrs.2578/abstract |
| Kurzbeschreibung (Abstract): | Layered stacks of the structure Si(100)/Ni/BCxNy were produced by physical (Ni) and chemical (BCN) vapor deposition. The BCN layers were deposited at temperatures of 200, 300, 400, and 500 °C. The resulting samples were characterized by ellipsometry, X-ray photoelectron spectrometry, secondary ion mass spectrometry, atomic force microscopy, and X-ray reflectometry. The formed structures of the samples synthesized at 200 and 500 °C, respectively, were determined. For the synthesis temperature of 200 °C, compounds with Ni-C bonds were found at the interface Ni/BCxNy. For the sample produced at 500 °C, compounds with Ni-Si bonds were identified, dispersed as particles or droplets in the corresponding interface. Copyright © 2015 John Wiley & Sons, Ltd. |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Materialanalytik 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Physics of Surfaces 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Strukturforschung |
| Hinterlegungsdatum: | 26 Mär 2015 16:43 |
| Letzte Änderung: | 21 Jan 2016 10:29 |
| PPN: | |
| Sponsoren: | The authors acknowledge the financial support by Deutsche Forschungsgemeinschaft (DFG), grant EN 207/25-1, and by the Russian Foundation of Basic Research (RFBR=RFFI), grant 10-03-91332. |
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