TU Darmstadt / ULB / TUbiblio

CO2-Laser Flash Evaporation as Novel CVD Precursor Delivery System for Functional Thin Film Growth

Loho, Christoph and Darbandi, Azad J. and Djenadic, Ruzica and Clemens, Oliver and Hahn, Horst (2014):
CO2-Laser Flash Evaporation as Novel CVD Precursor Delivery System for Functional Thin Film Growth.
In: Chemical Vapor Deposition, 20 (4-5-6), pp. 152-160. WILEY-VCH Verlag GmbH & Co. KGaA, ISSN 09481907,
[Article]

Abstract

A novel approach for functional thin film deposition using laser flash evaporation as the precursor delivery system is reported. In this newly established CO2-laser-assisted (LA)CVD, solid precursors with low volatility are non-selectively sublimated by absorption of infrared laser radiation. Thus, the method allows for the highly controlled growth of multicomponent thin films with desired composition and stoichiometry over the entire growth period. Thin film microstructural features, such as the morphology, density, and thickness of the films can be adjusted by tuning the process parameters. These features, characterized by means of scanning electron microscopy (SEM), X-ray diffraction (XRD), and Raman spectroscopy (RS), are discussed for LiCoO2 thin films. Additional analyses include X-ray photoelectron spectroscopy (XPS), inductively coupled plasma optical emission spectrometry (ICP-OES), cyclic voltammetry (CV), and galvanostatic cycling.

Item Type: Article
Erschienen: 2014
Creators: Loho, Christoph and Darbandi, Azad J. and Djenadic, Ruzica and Clemens, Oliver and Hahn, Horst
Title: CO2-Laser Flash Evaporation as Novel CVD Precursor Delivery System for Functional Thin Film Growth
Language: English
Abstract:

A novel approach for functional thin film deposition using laser flash evaporation as the precursor delivery system is reported. In this newly established CO2-laser-assisted (LA)CVD, solid precursors with low volatility are non-selectively sublimated by absorption of infrared laser radiation. Thus, the method allows for the highly controlled growth of multicomponent thin films with desired composition and stoichiometry over the entire growth period. Thin film microstructural features, such as the morphology, density, and thickness of the films can be adjusted by tuning the process parameters. These features, characterized by means of scanning electron microscopy (SEM), X-ray diffraction (XRD), and Raman spectroscopy (RS), are discussed for LiCoO2 thin films. Additional analyses include X-ray photoelectron spectroscopy (XPS), inductively coupled plasma optical emission spectrometry (ICP-OES), cyclic voltammetry (CV), and galvanostatic cycling.

Journal or Publication Title: Chemical Vapor Deposition
Journal volume: 20
Number: 4-5-6
Publisher: WILEY-VCH Verlag GmbH & Co. KGaA
Uncontrolled Keywords: CO2-LACVD, Flash evaporation, Functional thin films, Lithium cobalt oxide, Precursor delivery system
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Fachgebiet Materialdesign durch Synthese
11 Department of Materials and Earth Sciences > Material Science > Joint Research Laboratory Nanomaterials
Date Deposited: 16 Feb 2015 13:06
Official URL: http://dx.doi.org/10.1002/cvde.201307089
Identification Number: doi:10.1002/cvde.201307089
Funders: The authors gratefully acknowledge a major equipment grant "Competence South - Electrochemistry for Electromobility" from the Federal Ministry of Education and Research (Contract number: 6091/89161/03KP801)., Further support for an equipment grant by the State of Hesse is appreciated., Christoph Loho and Prof. Dr. Horst Hahn acknowledge the financial support by the Portfolio project "Electrochemical storage in systems" provided by Helmholtz Association.
Export:
Suche nach Titel in: TUfind oder in Google
Send an inquiry Send an inquiry

Options (only for editors)
Show editorial Details Show editorial Details