Loho, Christoph ; Darbandi, Azad J. ; Djenadic, Ruzica ; Clemens, Oliver ; Hahn, Horst (2014)
CO2-Laser Flash Evaporation as Novel CVD Precursor Delivery System for Functional Thin Film Growth.
In: Chemical Vapor Deposition, 20 (4-5-6)
doi: 10.1002/cvde.201307089
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
A novel approach for functional thin film deposition using laser flash evaporation as the precursor delivery system is reported. In this newly established CO2-laser-assisted (LA)CVD, solid precursors with low volatility are non-selectively sublimated by absorption of infrared laser radiation. Thus, the method allows for the highly controlled growth of multicomponent thin films with desired composition and stoichiometry over the entire growth period. Thin film microstructural features, such as the morphology, density, and thickness of the films can be adjusted by tuning the process parameters. These features, characterized by means of scanning electron microscopy (SEM), X-ray diffraction (XRD), and Raman spectroscopy (RS), are discussed for LiCoO2 thin films. Additional analyses include X-ray photoelectron spectroscopy (XPS), inductively coupled plasma optical emission spectrometry (ICP-OES), cyclic voltammetry (CV), and galvanostatic cycling.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2014 |
| Autor(en): | Loho, Christoph ; Darbandi, Azad J. ; Djenadic, Ruzica ; Clemens, Oliver ; Hahn, Horst |
| Art des Eintrags: | Bibliographie |
| Titel: | CO2-Laser Flash Evaporation as Novel CVD Precursor Delivery System for Functional Thin Film Growth |
| Sprache: | Englisch |
| Publikationsjahr: | Juni 2014 |
| Verlag: | WILEY-VCH Verlag GmbH & Co. KGaA |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Chemical Vapor Deposition |
| Jahrgang/Volume einer Zeitschrift: | 20 |
| (Heft-)Nummer: | 4-5-6 |
| DOI: | 10.1002/cvde.201307089 |
| Kurzbeschreibung (Abstract): | A novel approach for functional thin film deposition using laser flash evaporation as the precursor delivery system is reported. In this newly established CO2-laser-assisted (LA)CVD, solid precursors with low volatility are non-selectively sublimated by absorption of infrared laser radiation. Thus, the method allows for the highly controlled growth of multicomponent thin films with desired composition and stoichiometry over the entire growth period. Thin film microstructural features, such as the morphology, density, and thickness of the films can be adjusted by tuning the process parameters. These features, characterized by means of scanning electron microscopy (SEM), X-ray diffraction (XRD), and Raman spectroscopy (RS), are discussed for LiCoO2 thin films. Additional analyses include X-ray photoelectron spectroscopy (XPS), inductively coupled plasma optical emission spectrometry (ICP-OES), cyclic voltammetry (CV), and galvanostatic cycling. |
| Freie Schlagworte: | CO2-LACVD, Flash evaporation, Functional thin films, Lithium cobalt oxide, Precursor delivery system |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Materialdesign durch Synthese 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Gemeinschaftslabor Nanomaterialien |
| Hinterlegungsdatum: | 16 Feb 2015 13:06 |
| Letzte Änderung: | 12 Apr 2017 12:21 |
| PPN: | |
| Sponsoren: | The authors gratefully acknowledge a major equipment grant "Competence South - Electrochemistry for Electromobility" from the Federal Ministry of Education and Research (Contract number: 6091/89161/03KP801)., Further support for an equipment grant by the State of Hesse is appreciated., Christoph Loho and Prof. Dr. Horst Hahn acknowledge the financial support by the Portfolio project "Electrochemical storage in systems" provided by Helmholtz Association. |
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