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Large-distance rf- and dc-sputtering of epitaxial La1−xSrxMnO3 thin films

Leufke, Philipp M. and Mishra, Ajay Kumar and Beck, André and Wang, Di and Kübel, Christian and Kruk, Robert and Hahn, Horst (2012):
Large-distance rf- and dc-sputtering of epitaxial La1−xSrxMnO3 thin films.
520, In: Thin Solid Films, (17), Elsevier Science Publishing, pp. 5521-5527, ISSN 00406090, [Online-Edition: http://dx.doi.org/10.1016/j.tsf.2012.04.064],
[Article]

Abstract

Studies on large-distance sputtering as an effective alternative to molecular beam epitaxy, pulsed laser deposition or off-axis sputtering for the deposition of epitaxial La1 − xSrxMnO3 (LSMO) thin films, are reported. The focus of this study is on the quality of the samples and their structural and magnetic properties. The dependence of the characteristics of the LSMO films on the sputtering mode (rf, dc) and the sputtering parameters, in particular on the oxygen partial pressure is established and discussed. It is shown that large-distance sputtering can provide high quality LSMO thin films without the need for post-annealing.

Item Type: Article
Erschienen: 2012
Creators: Leufke, Philipp M. and Mishra, Ajay Kumar and Beck, André and Wang, Di and Kübel, Christian and Kruk, Robert and Hahn, Horst
Title: Large-distance rf- and dc-sputtering of epitaxial La1−xSrxMnO3 thin films
Language: English
Abstract:

Studies on large-distance sputtering as an effective alternative to molecular beam epitaxy, pulsed laser deposition or off-axis sputtering for the deposition of epitaxial La1 − xSrxMnO3 (LSMO) thin films, are reported. The focus of this study is on the quality of the samples and their structural and magnetic properties. The dependence of the characteristics of the LSMO films on the sputtering mode (rf, dc) and the sputtering parameters, in particular on the oxygen partial pressure is established and discussed. It is shown that large-distance sputtering can provide high quality LSMO thin films without the need for post-annealing.

Journal or Publication Title: Thin Solid Films
Volume: 520
Number: 17
Publisher: Elsevier Science Publishing
Uncontrolled Keywords: Lanthanum strontium manganite, Sputtering, Epitaxial growth, Phase transition, Magnetic properties, Transport properties
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Joint Research Laboratory Nanomaterials
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 17 Jun 2014 10:55
Official URL: http://dx.doi.org/10.1016/j.tsf.2012.04.064
Identification Number: doi:10.1016/j.tsf.2012.04.064
Funders: This work was partially supported by the Deutsche Forschungsgemeinschaft (DFG) under contract HA1344/28-1.
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