Leufke, Philipp M. ; Mishra, Ajay Kumar ; Beck, André ; Wang, Di ; Kübel, Christian ; Kruk, Robert ; Hahn, Horst (2012)
Large-distance rf- and dc-sputtering of epitaxial La1−xSrxMnO3 thin films.
In: Thin Solid Films, 520 (17)
doi: 10.1016/j.tsf.2012.04.064
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
Studies on large-distance sputtering as an effective alternative to molecular beam epitaxy, pulsed laser deposition or off-axis sputtering for the deposition of epitaxial La1 − xSrxMnO3 (LSMO) thin films, are reported. The focus of this study is on the quality of the samples and their structural and magnetic properties. The dependence of the characteristics of the LSMO films on the sputtering mode (rf, dc) and the sputtering parameters, in particular on the oxygen partial pressure is established and discussed. It is shown that large-distance sputtering can provide high quality LSMO thin films without the need for post-annealing.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2012 |
| Autor(en): | Leufke, Philipp M. ; Mishra, Ajay Kumar ; Beck, André ; Wang, Di ; Kübel, Christian ; Kruk, Robert ; Hahn, Horst |
| Art des Eintrags: | Bibliographie |
| Titel: | Large-distance rf- and dc-sputtering of epitaxial La1−xSrxMnO3 thin films |
| Sprache: | Englisch |
| Publikationsjahr: | 30 Juni 2012 |
| Verlag: | Elsevier Science Publishing |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Thin Solid Films |
| Jahrgang/Volume einer Zeitschrift: | 520 |
| (Heft-)Nummer: | 17 |
| DOI: | 10.1016/j.tsf.2012.04.064 |
| Kurzbeschreibung (Abstract): | Studies on large-distance sputtering as an effective alternative to molecular beam epitaxy, pulsed laser deposition or off-axis sputtering for the deposition of epitaxial La1 − xSrxMnO3 (LSMO) thin films, are reported. The focus of this study is on the quality of the samples and their structural and magnetic properties. The dependence of the characteristics of the LSMO films on the sputtering mode (rf, dc) and the sputtering parameters, in particular on the oxygen partial pressure is established and discussed. It is shown that large-distance sputtering can provide high quality LSMO thin films without the need for post-annealing. |
| Freie Schlagworte: | Lanthanum strontium manganite, Sputtering, Epitaxial growth, Phase transition, Magnetic properties, Transport properties |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Gemeinschaftslabor Nanomaterialien 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften |
| Hinterlegungsdatum: | 17 Jun 2014 10:55 |
| Letzte Änderung: | 17 Jun 2014 10:55 |
| PPN: | |
| Sponsoren: | This work was partially supported by the Deutsche Forschungsgemeinschaft (DFG) under contract HA1344/28-1. |
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