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Microstructure and residual stress of magnetron sputtered nanocrystalline palladium and palladium gold films on polymer substrates

Castrup, Anna ; Kübel, Christian ; Scherer, Torsten ; Hahn, Horst (2011)
Microstructure and residual stress of magnetron sputtered nanocrystalline palladium and palladium gold films on polymer substrates.
In: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 29 (2)
doi: 10.1116/1.3554265
Artikel, Bibliographie

Kurzbeschreibung (Abstract)

The authors report the structural properties and residual stresses of 500-nm-thick nanocrystalline Pd and PdAu films on compliant substrates prepared by magnetron sputtering as a function of the pressure of the Ar-sputtering gas. Films were analyzed by x-ray diffraction, cross-sectional transmission electron microscopy, and x-ray photoelectron spectroscopy. At low pressures the metal films exhibit strong compressive stresses, which rapidly change to highly tensile with increasing pressure, and then gradually decrease. Along with this effect a change in microstructure is observed from a dense equiaxed structure at low pressures to distinctive columns with reduced atomic density at the column walls at higher pressures. The preparation of nearly stress-free dense nanocrystalline films is demonstrated.

Typ des Eintrags: Artikel
Erschienen: 2011
Autor(en): Castrup, Anna ; Kübel, Christian ; Scherer, Torsten ; Hahn, Horst
Art des Eintrags: Bibliographie
Titel: Microstructure and residual stress of magnetron sputtered nanocrystalline palladium and palladium gold films on polymer substrates
Sprache: Englisch
Publikationsjahr: 2011
Verlag: American Vacuum Society
Titel der Zeitschrift, Zeitung oder Schriftenreihe: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Jahrgang/Volume einer Zeitschrift: 29
(Heft-)Nummer: 2
DOI: 10.1116/1.3554265
Kurzbeschreibung (Abstract):

The authors report the structural properties and residual stresses of 500-nm-thick nanocrystalline Pd and PdAu films on compliant substrates prepared by magnetron sputtering as a function of the pressure of the Ar-sputtering gas. Films were analyzed by x-ray diffraction, cross-sectional transmission electron microscopy, and x-ray photoelectron spectroscopy. At low pressures the metal films exhibit strong compressive stresses, which rapidly change to highly tensile with increasing pressure, and then gradually decrease. Along with this effect a change in microstructure is observed from a dense equiaxed structure at low pressures to distinctive columns with reduced atomic density at the column walls at higher pressures. The preparation of nearly stress-free dense nanocrystalline films is demonstrated.

Freie Schlagworte: gold alloys, internal stresses, nanofabrication, nanostructured materials, palladium, palladium alloys, sputter deposition, transmission electron microscopy, X-ray diffraction, X-ray photoelectron spectra, palladium, palladium gold
Fachbereich(e)/-gebiet(e): 11 Fachbereich Material- und Geowissenschaften
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Gemeinschaftslabor Nanomaterialien
Hinterlegungsdatum: 15 Feb 2013 10:30
Letzte Änderung: 11 Dez 2018 13:29
PPN:
Sponsoren: Financial support by a DFG grant “DFG Projektgruppe Plastizität in Nanokristallinen Metallen und Legierungen FOR 714” is gratefully acknowledged.
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