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Microstructure and residual stress of magnetron sputtered nanocrystalline palladium and palladium gold films on polymer substrates

Castrup, Anna and Kübel, Christian and Scherer, Torsten and Hahn, Horst (2011):
Microstructure and residual stress of magnetron sputtered nanocrystalline palladium and palladium gold films on polymer substrates.
29, In: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, (2), American Vacuum Society, pp. 021013-1, ISSN 07342101, [Online-Edition: http://dx.doi.org/10.1116/1.3554265],
[Article]

Abstract

The authors report the structural properties and residual stresses of 500-nm-thick nanocrystalline Pd and PdAu films on compliant substrates prepared by magnetron sputtering as a function of the pressure of the Ar-sputtering gas. Films were analyzed by x-ray diffraction, cross-sectional transmission electron microscopy, and x-ray photoelectron spectroscopy. At low pressures the metal films exhibit strong compressive stresses, which rapidly change to highly tensile with increasing pressure, and then gradually decrease. Along with this effect a change in microstructure is observed from a dense equiaxed structure at low pressures to distinctive columns with reduced atomic density at the column walls at higher pressures. The preparation of nearly stress-free dense nanocrystalline films is demonstrated.

Item Type: Article
Erschienen: 2011
Creators: Castrup, Anna and Kübel, Christian and Scherer, Torsten and Hahn, Horst
Title: Microstructure and residual stress of magnetron sputtered nanocrystalline palladium and palladium gold films on polymer substrates
Language: English
Abstract:

The authors report the structural properties and residual stresses of 500-nm-thick nanocrystalline Pd and PdAu films on compliant substrates prepared by magnetron sputtering as a function of the pressure of the Ar-sputtering gas. Films were analyzed by x-ray diffraction, cross-sectional transmission electron microscopy, and x-ray photoelectron spectroscopy. At low pressures the metal films exhibit strong compressive stresses, which rapidly change to highly tensile with increasing pressure, and then gradually decrease. Along with this effect a change in microstructure is observed from a dense equiaxed structure at low pressures to distinctive columns with reduced atomic density at the column walls at higher pressures. The preparation of nearly stress-free dense nanocrystalline films is demonstrated.

Journal or Publication Title: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Volume: 29
Number: 2
Publisher: American Vacuum Society
Uncontrolled Keywords: gold alloys, internal stresses, nanofabrication, nanostructured materials, palladium, palladium alloys, sputter deposition, transmission electron microscopy, X-ray diffraction, X-ray photoelectron spectra, palladium, palladium gold
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Joint Research Laboratory Nanomaterials
Date Deposited: 15 Feb 2013 10:30
Official URL: http://dx.doi.org/10.1116/1.3554265
Identification Number: doi:10.1116/1.3554265
Funders: Financial support by a DFG grant “DFG Projektgruppe Plastizität in Nanokristallinen Metallen und Legierungen FOR 714” is gratefully acknowledged.
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