Castrup, Anna ; Kübel, Christian ; Scherer, Torsten ; Hahn, Horst (2011)
Microstructure and residual stress of magnetron sputtered nanocrystalline palladium and palladium gold films on polymer substrates.
In: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 29 (2)
doi: 10.1116/1.3554265
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
The authors report the structural properties and residual stresses of 500-nm-thick nanocrystalline Pd and PdAu films on compliant substrates prepared by magnetron sputtering as a function of the pressure of the Ar-sputtering gas. Films were analyzed by x-ray diffraction, cross-sectional transmission electron microscopy, and x-ray photoelectron spectroscopy. At low pressures the metal films exhibit strong compressive stresses, which rapidly change to highly tensile with increasing pressure, and then gradually decrease. Along with this effect a change in microstructure is observed from a dense equiaxed structure at low pressures to distinctive columns with reduced atomic density at the column walls at higher pressures. The preparation of nearly stress-free dense nanocrystalline films is demonstrated.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2011 |
| Autor(en): | Castrup, Anna ; Kübel, Christian ; Scherer, Torsten ; Hahn, Horst |
| Art des Eintrags: | Bibliographie |
| Titel: | Microstructure and residual stress of magnetron sputtered nanocrystalline palladium and palladium gold films on polymer substrates |
| Sprache: | Englisch |
| Publikationsjahr: | 2011 |
| Verlag: | American Vacuum Society |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films |
| Jahrgang/Volume einer Zeitschrift: | 29 |
| (Heft-)Nummer: | 2 |
| DOI: | 10.1116/1.3554265 |
| Kurzbeschreibung (Abstract): | The authors report the structural properties and residual stresses of 500-nm-thick nanocrystalline Pd and PdAu films on compliant substrates prepared by magnetron sputtering as a function of the pressure of the Ar-sputtering gas. Films were analyzed by x-ray diffraction, cross-sectional transmission electron microscopy, and x-ray photoelectron spectroscopy. At low pressures the metal films exhibit strong compressive stresses, which rapidly change to highly tensile with increasing pressure, and then gradually decrease. Along with this effect a change in microstructure is observed from a dense equiaxed structure at low pressures to distinctive columns with reduced atomic density at the column walls at higher pressures. The preparation of nearly stress-free dense nanocrystalline films is demonstrated. |
| Freie Schlagworte: | gold alloys, internal stresses, nanofabrication, nanostructured materials, palladium, palladium alloys, sputter deposition, transmission electron microscopy, X-ray diffraction, X-ray photoelectron spectra, palladium, palladium gold |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Gemeinschaftslabor Nanomaterialien |
| Hinterlegungsdatum: | 15 Feb 2013 10:30 |
| Letzte Änderung: | 11 Dez 2018 13:29 |
| PPN: | |
| Sponsoren: | Financial support by a DFG grant “DFG Projektgruppe Plastizität in Nanokristallinen Metallen und Legierungen FOR 714” is gratefully acknowledged. |
| Export: | |
| Suche nach Titel in: | TUfind oder in Google |
 |
Frage zum Eintrag |
Optionen (nur für Redakteure)
 |
Redaktionelle Details anzeigen |
Drucken
Impressum