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Application of high power impulse magnetron sputtering (HiPIMS) to cover surface imperfections. Microstructural adjustment of CrN monolayer by variation of HiPIMS parameters

Slomski, Elena Maja and Scheerer, Herbert and Troßmann, Torsten and Berger, Christina (2010):
Application of high power impulse magnetron sputtering (HiPIMS) to cover surface imperfections. Microstructural adjustment of CrN monolayer by variation of HiPIMS parameters.
In: Materials Science and Engineering, MSE 2010, 24 – 26 August 2010, Darmstadt, Germany. Frankfurt: DGM, 2010, 1 S. (Oral Poster),
[Conference or Workshop Item]

Item Type: Conference or Workshop Item
Erschienen: 2010
Creators: Slomski, Elena Maja and Scheerer, Herbert and Troßmann, Torsten and Berger, Christina
Title: Application of high power impulse magnetron sputtering (HiPIMS) to cover surface imperfections. Microstructural adjustment of CrN monolayer by variation of HiPIMS parameters
Language: English
Title of Book: Materials Science and Engineering, MSE 2010, 24 – 26 August 2010, Darmstadt, Germany. Frankfurt: DGM, 2010, 1 S. (Oral Poster)
Divisions: 16 Department of Mechanical Engineering
16 Department of Mechanical Engineering > Center for Engineering Materials, State Materials Testing Institute Darmstadt (MPA) Chair and Institute for Materials Technology (IfW)
Date Deposited: 25 Jul 2012 13:57
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