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Development of Graded Low Friction SiCN Coatings with Extended High Temperature Stability above 1 200 °C

Hoche, Holger and Allebrandt, Daniel and Riedel, Ralf and Fasel, Claudia (2009):
Development of Graded Low Friction SiCN Coatings with Extended High Temperature Stability above 1 200 °C.
In: Plasma Processes and Polymers, Wiley, pp. S649-S654, 6, (S1), ISSN 16128850,
[Online-Edition: http://dx.doi.org/10.1002/ppap.200931709],
[Article]

Abstract

The authors developed a coating concept based on amorphous Si/C/N coatings, with promising high temperature properties. Due to a graded coating design, the adhesion, the coating hardness as well as the coefficient of friction were optimized. The coatings showed excellent high temperature stability against chemical decomposition, structural changes and surface oxidation up to 1 350 °C. To allow the deposition of coatings with a certain chemical composition, a numerical relationship between the composition of the coatings and the deposition parameters was established.

Item Type: Article
Erschienen: 2009
Creators: Hoche, Holger and Allebrandt, Daniel and Riedel, Ralf and Fasel, Claudia
Title: Development of Graded Low Friction SiCN Coatings with Extended High Temperature Stability above 1 200 °C
Language: English
Abstract:

The authors developed a coating concept based on amorphous Si/C/N coatings, with promising high temperature properties. Due to a graded coating design, the adhesion, the coating hardness as well as the coefficient of friction were optimized. The coatings showed excellent high temperature stability against chemical decomposition, structural changes and surface oxidation up to 1 350 °C. To allow the deposition of coatings with a certain chemical composition, a numerical relationship between the composition of the coatings and the deposition parameters was established.

Journal or Publication Title: Plasma Processes and Polymers
Volume: 6
Number: S1
Publisher: Wiley
Uncontrolled Keywords: degradation, physical vapour deposition (PVD), SiCN, thermal properties
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Dispersive Solids
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 13 Apr 2012 10:47
Official URL: http://dx.doi.org/10.1002/ppap.200931709
Identification Number: doi:10.1002/ppap.200931709
Funders: The authors acknowledge the financial support of the German Research Foundation (DFG), Project no. HO3315-5-1.
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