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Piezoresistive Effect in SiOC Ceramics for Integrated Pressure Sensors

Riedel, Ralf and Toma, Liviu and Janssen, Enrico and Nuffer, Jürgen and Melz, Tobias and Hanselka, Holger (2010):
Piezoresistive Effect in SiOC Ceramics for Integrated Pressure Sensors.
93, In: Journal of the American Ceramic Society, (4), Wiley, pp. 920-924, ISSN 00027820, [Online-Edition: http://dx.doi.org/10.1111/j.1551-2916.2009.03496.x],
[Article]

Abstract

Piezoresistivity was found in silicon oxycarbide (SiOC) ceramics synthesized using a polymer-to-ceramic transformation process. A commercial polysiloxane, namely poly(methylsilsesquioxane), was used as the starting material. The SiOC ceramic synthesized at 1400°C exhibits high piezoresistivity, leading to strain sensitivities (k factors) of ∼145, while lower pyrolysis temperatures (1000°–1300°C) do not show a piezoresistive effect. Structural characterization by X-ray diffraction in combination with micro-Raman spectroscopy revealed that with increasing pyrolysis temperature, the content of free carbon in the X-ray amorphous SiOC matrix increases without changes in the overall composition. Percolation effects related to the carbon-based phase segregated from the SiOC matrix are responsible for the piezoresistivity analyzed in the SiOC ceramic.

Item Type: Article
Erschienen: 2010
Creators: Riedel, Ralf and Toma, Liviu and Janssen, Enrico and Nuffer, Jürgen and Melz, Tobias and Hanselka, Holger
Title: Piezoresistive Effect in SiOC Ceramics for Integrated Pressure Sensors
Language: English
Abstract:

Piezoresistivity was found in silicon oxycarbide (SiOC) ceramics synthesized using a polymer-to-ceramic transformation process. A commercial polysiloxane, namely poly(methylsilsesquioxane), was used as the starting material. The SiOC ceramic synthesized at 1400°C exhibits high piezoresistivity, leading to strain sensitivities (k factors) of ∼145, while lower pyrolysis temperatures (1000°–1300°C) do not show a piezoresistive effect. Structural characterization by X-ray diffraction in combination with micro-Raman spectroscopy revealed that with increasing pyrolysis temperature, the content of free carbon in the X-ray amorphous SiOC matrix increases without changes in the overall composition. Percolation effects related to the carbon-based phase segregated from the SiOC matrix are responsible for the piezoresistivity analyzed in the SiOC ceramic.

Journal or Publication Title: Journal of the American Ceramic Society
Volume: 93
Number: 4
Publisher: Wiley
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Dispersive Solids
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 05 Apr 2012 11:23
Official URL: http://dx.doi.org/10.1111/j.1551-2916.2009.03496.x
Identification Number: doi:10.1111/j.1551-2916.2009.03496.x
Funders: Fonds der Chemischen Industrie, Frankfurt, Germany
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