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Piezoresistive Effect in SiOC Ceramics for Integrated Pressure Sensors

Riedel, Ralf ; Toma, Liviu ; Janssen, Enrico ; Nuffer, Jürgen ; Melz, Tobias ; Hanselka, Holger :
Piezoresistive Effect in SiOC Ceramics for Integrated Pressure Sensors.
[Online-Edition: http://dx.doi.org/10.1111/j.1551-2916.2009.03496.x]
In: Journal of the American Ceramic Society, 93 (4) S. 920-924. ISSN 00027820
[Artikel] , (2010)

Offizielle URL: http://dx.doi.org/10.1111/j.1551-2916.2009.03496.x

Kurzbeschreibung (Abstract)

Piezoresistivity was found in silicon oxycarbide (SiOC) ceramics synthesized using a polymer-to-ceramic transformation process. A commercial polysiloxane, namely poly(methylsilsesquioxane), was used as the starting material. The SiOC ceramic synthesized at 1400°C exhibits high piezoresistivity, leading to strain sensitivities (k factors) of ∼145, while lower pyrolysis temperatures (1000°–1300°C) do not show a piezoresistive effect. Structural characterization by X-ray diffraction in combination with micro-Raman spectroscopy revealed that with increasing pyrolysis temperature, the content of free carbon in the X-ray amorphous SiOC matrix increases without changes in the overall composition. Percolation effects related to the carbon-based phase segregated from the SiOC matrix are responsible for the piezoresistivity analyzed in the SiOC ceramic.

Typ des Eintrags: Artikel
Erschienen: 2010
Autor(en): Riedel, Ralf ; Toma, Liviu ; Janssen, Enrico ; Nuffer, Jürgen ; Melz, Tobias ; Hanselka, Holger
Titel: Piezoresistive Effect in SiOC Ceramics for Integrated Pressure Sensors
Sprache: Englisch
Kurzbeschreibung (Abstract):

Piezoresistivity was found in silicon oxycarbide (SiOC) ceramics synthesized using a polymer-to-ceramic transformation process. A commercial polysiloxane, namely poly(methylsilsesquioxane), was used as the starting material. The SiOC ceramic synthesized at 1400°C exhibits high piezoresistivity, leading to strain sensitivities (k factors) of ∼145, while lower pyrolysis temperatures (1000°–1300°C) do not show a piezoresistive effect. Structural characterization by X-ray diffraction in combination with micro-Raman spectroscopy revealed that with increasing pyrolysis temperature, the content of free carbon in the X-ray amorphous SiOC matrix increases without changes in the overall composition. Percolation effects related to the carbon-based phase segregated from the SiOC matrix are responsible for the piezoresistivity analyzed in the SiOC ceramic.

Titel der Zeitschrift, Zeitung oder Schriftenreihe: Journal of the American Ceramic Society
Band: 93
(Heft-)Nummer: 4
Verlag: Wiley
Fachbereich(e)/-gebiet(e): 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Disperse Feststoffe
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft
11 Fachbereich Material- und Geowissenschaften
Hinterlegungsdatum: 05 Apr 2012 11:23
Offizielle URL: http://dx.doi.org/10.1111/j.1551-2916.2009.03496.x
ID-Nummer: doi:10.1111/j.1551-2916.2009.03496.x
Sponsoren: Fonds der Chemischen Industrie, Frankfurt, Germany
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