Riedel, Ralf ; Toma, Liviu ; Janssen, Enrico ; Nuffer, Jürgen ; Melz, Tobias ; Hanselka, Holger (2010)
Piezoresistive Effect in SiOC Ceramics for Integrated Pressure Sensors.
In: Journal of the American Ceramic Society, 93 (4)
doi: 10.1111/j.1551-2916.2009.03496.x
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
Piezoresistivity was found in silicon oxycarbide (SiOC) ceramics synthesized using a polymer-to-ceramic transformation process. A commercial polysiloxane, namely poly(methylsilsesquioxane), was used as the starting material. The SiOC ceramic synthesized at 1400°C exhibits high piezoresistivity, leading to strain sensitivities (k factors) of ∼145, while lower pyrolysis temperatures (1000°–1300°C) do not show a piezoresistive effect. Structural characterization by X-ray diffraction in combination with micro-Raman spectroscopy revealed that with increasing pyrolysis temperature, the content of free carbon in the X-ray amorphous SiOC matrix increases without changes in the overall composition. Percolation effects related to the carbon-based phase segregated from the SiOC matrix are responsible for the piezoresistivity analyzed in the SiOC ceramic.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2010 |
| Autor(en): | Riedel, Ralf ; Toma, Liviu ; Janssen, Enrico ; Nuffer, Jürgen ; Melz, Tobias ; Hanselka, Holger |
| Art des Eintrags: | Bibliographie |
| Titel: | Piezoresistive Effect in SiOC Ceramics for Integrated Pressure Sensors |
| Sprache: | Englisch |
| Publikationsjahr: | April 2010 |
| Verlag: | Wiley |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Journal of the American Ceramic Society |
| Jahrgang/Volume einer Zeitschrift: | 93 |
| (Heft-)Nummer: | 4 |
| DOI: | 10.1111/j.1551-2916.2009.03496.x |
| Kurzbeschreibung (Abstract): | Piezoresistivity was found in silicon oxycarbide (SiOC) ceramics synthesized using a polymer-to-ceramic transformation process. A commercial polysiloxane, namely poly(methylsilsesquioxane), was used as the starting material. The SiOC ceramic synthesized at 1400°C exhibits high piezoresistivity, leading to strain sensitivities (k factors) of ∼145, while lower pyrolysis temperatures (1000°–1300°C) do not show a piezoresistive effect. Structural characterization by X-ray diffraction in combination with micro-Raman spectroscopy revealed that with increasing pyrolysis temperature, the content of free carbon in the X-ray amorphous SiOC matrix increases without changes in the overall composition. Percolation effects related to the carbon-based phase segregated from the SiOC matrix are responsible for the piezoresistivity analyzed in the SiOC ceramic. |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Disperse Feststoffe 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften |
| Hinterlegungsdatum: | 05 Apr 2012 11:23 |
| Letzte Änderung: | 05 Mär 2013 10:00 |
| PPN: | |
| Sponsoren: | Fonds der Chemischen Industrie, Frankfurt, Germany |
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