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Electro Thermal and Electro Statical Actuation of a Surface Micromachined Tunable Fabry-Pérot Filter

Gierl, C. and Zogal, Karolina and Davani, Hooman A. and Meissner, Peter (2011):
Electro Thermal and Electro Statical Actuation of a Surface Micromachined Tunable Fabry-Pérot Filter.
In: OSA Technical Digest (CD), pp. JTuI73, Optical Society of America, Quantum Electronics and Laser Science Conference, [Conference or Workshop Item]

Abstract

We present a surface micromachined electro-thermal as well as electro-statical tunable Fabry-Pérot filter for on wafer mass production. With insertion losses <1.4dB (from standard single mode fibre (SSMF) to SSMF) and a tuning range of 112nm.

Item Type: Conference or Workshop Item
Erschienen: 2011
Creators: Gierl, C. and Zogal, Karolina and Davani, Hooman A. and Meissner, Peter
Title: Electro Thermal and Electro Statical Actuation of a Surface Micromachined Tunable Fabry-Pérot Filter
Language: English
Abstract:

We present a surface micromachined electro-thermal as well as electro-statical tunable Fabry-Pérot filter for on wafer mass production. With insertion losses <1.4dB (from standard single mode fibre (SSMF) to SSMF) and a tuning range of 112nm.

Series Name: OSA Technical Digest (CD)
Publisher: Optical Society of America
Uncontrolled Keywords: Optical microelectromechanical devices, Resonators, Wavelength filtering devices
Divisions: 18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics > Photonics and Optical Communications
18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics
Event Title: Quantum Electronics and Laser Science Conference
Date Deposited: 08 Mar 2012 16:09
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