Gierl, C. and Zogal, Karolina and Davani, Hooman A. and Meissner, Peter (2011):
Electro Thermal and Electro Statical Actuation of a Surface Micromachined Tunable Fabry-Pérot Filter.
In: OSA Technical Digest (CD), pp. JTuI73, Optical Society of America, Quantum Electronics and Laser Science Conference, [Conference or Workshop Item]
Abstract
We present a surface micromachined electro-thermal as well as electro-statical tunable Fabry-Pérot filter for on wafer mass production. With insertion losses <1.4dB (from standard single mode fibre (SSMF) to SSMF) and a tuning range of 112nm.
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 2011 |
| Creators: | Gierl, C. and Zogal, Karolina and Davani, Hooman A. and Meissner, Peter |
| Title: | Electro Thermal and Electro Statical Actuation of a Surface Micromachined Tunable Fabry-Pérot Filter |
| Language: | English |
| Abstract: | We present a surface micromachined electro-thermal as well as electro-statical tunable Fabry-Pérot filter for on wafer mass production. With insertion losses <1.4dB (from standard single mode fibre (SSMF) to SSMF) and a tuning range of 112nm. |
| Series Name: | OSA Technical Digest (CD) |
| Publisher: | Optical Society of America |
| Uncontrolled Keywords: | Optical microelectromechanical devices, Resonators, Wavelength filtering devices |
| Divisions: | 18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics > Photonics and Optical Communications 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics |
| Event Title: | Quantum Electronics and Laser Science Conference |
| Date Deposited: | 08 Mar 2012 16:09 |
| Corresponding Links: | |
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