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Fluorine and carbon ion implantation and deposition on metals by plasma source ion implantation

Flege, Stefan ; Hatada, Ruriko ; Baba, Koumei ; Ensinger, Wolfgang :
Fluorine and carbon ion implantation and deposition on metals by plasma source ion implantation.
[Online-Edition: http://www.sciencedirect.com/science/article/pii/S0257897211...]
In: Surface and Coatings Technology, 206 (5) pp. 963-966.
[Artikel], (2011)

Offizielle URL: http://www.sciencedirect.com/science/article/pii/S0257897211...

Kurzbeschreibung (Abstract)

Deposition of fluorine containing diamond-like carbon films is an effective solution for the improvement of machine parts in an aggressive aqueous environment when the combination of a hydrophobic surface with good corrosion protection and low friction coefficients is required. Stainless steel and silicon were treated by plasma source ion implantation using the gases CF4, C6F6 and C6H5F, in the latter case with previous methane implantation. Depending on the plasma gas there are differences in the fluorine content, depth distribution, film thickness, water contact angle and friction coefficient.

Typ des Eintrags: Artikel
Erschienen: 2011
Autor(en): Flege, Stefan ; Hatada, Ruriko ; Baba, Koumei ; Ensinger, Wolfgang
Titel: Fluorine and carbon ion implantation and deposition on metals by plasma source ion implantation
Sprache: Englisch
Kurzbeschreibung (Abstract):

Deposition of fluorine containing diamond-like carbon films is an effective solution for the improvement of machine parts in an aggressive aqueous environment when the combination of a hydrophobic surface with good corrosion protection and low friction coefficients is required. Stainless steel and silicon were treated by plasma source ion implantation using the gases CF4, C6F6 and C6H5F, in the latter case with previous methane implantation. Depending on the plasma gas there are differences in the fluorine content, depth distribution, film thickness, water contact angle and friction coefficient.

Titel der Zeitschrift, Zeitung oder Schriftenreihe: Surface and Coatings Technology
Band: 206
(Heft-)Nummer: 5
Verlag: Elsevier Science Publishing Company
Freie Schlagworte: Corrosion protection, Diamond-like carbon, Fluorine, Friction, Hydrophobic, Plasma source ion implantation
Fachbereich(e)/-gebiet(e): Fachbereich Material- und Geowissenschaften > Materialwissenschaften > Materialanalytik
Fachbereich Material- und Geowissenschaften > Materialwissenschaften
Fachbereich Material- und Geowissenschaften
Hinterlegungsdatum: 18 Nov 2011 13:41
Offizielle URL: http://www.sciencedirect.com/science/article/pii/S0257897211...
Zusätzliche Informationen:

Surface Modification of Materials by Ion beams 2009 — SMMIB 2009

Proceedings of the 16th International Conference on Surface Modification of Materials by Ion Beams

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