Flege, Stefan ; Hatada, Ruriko ; Baba, Koumei ; Ensinger, Wolfgang (2011)
Fluorine and carbon ion implantation and deposition on metals by plasma source ion implantation.
In: Surface and Coatings Technology, 206 (5)
Artikel, Bibliographie
Kurzbeschreibung (Abstract)
Deposition of fluorine containing diamond-like carbon films is an effective solution for the improvement of machine parts in an aggressive aqueous environment when the combination of a hydrophobic surface with good corrosion protection and low friction coefficients is required. Stainless steel and silicon were treated by plasma source ion implantation using the gases CF4, C6F6 and C6H5F, in the latter case with previous methane implantation. Depending on the plasma gas there are differences in the fluorine content, depth distribution, film thickness, water contact angle and friction coefficient.
| Typ des Eintrags: | Artikel |
|---|---|
| Erschienen: | 2011 |
| Autor(en): | Flege, Stefan ; Hatada, Ruriko ; Baba, Koumei ; Ensinger, Wolfgang |
| Art des Eintrags: | Bibliographie |
| Titel: | Fluorine and carbon ion implantation and deposition on metals by plasma source ion implantation |
| Sprache: | Englisch |
| Publikationsjahr: | 25 November 2011 |
| Verlag: | Elsevier Science Publishing Company |
| Titel der Zeitschrift, Zeitung oder Schriftenreihe: | Surface and Coatings Technology |
| Jahrgang/Volume einer Zeitschrift: | 206 |
| (Heft-)Nummer: | 5 |
| URL / URN: | http://www.sciencedirect.com/science/article/pii/S0257897211... |
| Kurzbeschreibung (Abstract): | Deposition of fluorine containing diamond-like carbon films is an effective solution for the improvement of machine parts in an aggressive aqueous environment when the combination of a hydrophobic surface with good corrosion protection and low friction coefficients is required. Stainless steel and silicon were treated by plasma source ion implantation using the gases CF4, C6F6 and C6H5F, in the latter case with previous methane implantation. Depending on the plasma gas there are differences in the fluorine content, depth distribution, film thickness, water contact angle and friction coefficient. |
| Freie Schlagworte: | Corrosion protection, Diamond-like carbon, Fluorine, Friction, Hydrophobic, Plasma source ion implantation |
| Zusätzliche Informationen: | Surface Modification of Materials by Ion beams 2009 — SMMIB 2009 Proceedings of the 16th International Conference on Surface Modification of Materials by Ion Beams |
| Fachbereich(e)/-gebiet(e): | 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Materialanalytik 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft 11 Fachbereich Material- und Geowissenschaften |
| Hinterlegungsdatum: | 18 Nov 2011 13:41 |
| Letzte Änderung: | 05 Mär 2013 09:55 |
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