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Patterning and Visualizing Self-Assembled Monolayers with Low-Energy Electrons

Krupke, Ralph and Malik, S. and Weber, H. B. and Hampe, O. and Kappes, M. M. and Löhneysen, Hilbert v. (2002):
Patterning and Visualizing Self-Assembled Monolayers with Low-Energy Electrons.
In: Nano Letters, 2 (10), pp. 1161-1164, ISSN 1530-6984,
[Online-Edition: http://dx.doi.org/10.1021/nl025679e],
[Article]

Abstract

We show that a trimethylsilyl (TMS) self-assembled monolayer on a silicon surface is a self-developing positive resist, which can be patterned with low energy electrons. Contact angle measurements have been used to quantify the efficiency of the exposure as a function of exposure dose and acceleration voltage. Ash formation was negligible, as a 3-aminopropyltriethoxysilane (APTES) self-assembled monolayer could be formed on the patterned area without an intermediate development stage. APTES/TMS patterns have been visualized with scanning electron microscopy at low energy and atomic force microscopy. The functionality of the patterns has been tested by selective deposition of carbon nanotubes.

Item Type: Article
Erschienen: 2002
Creators: Krupke, Ralph and Malik, S. and Weber, H. B. and Hampe, O. and Kappes, M. M. and Löhneysen, Hilbert v.
Title: Patterning and Visualizing Self-Assembled Monolayers with Low-Energy Electrons
Language: English
Abstract:

We show that a trimethylsilyl (TMS) self-assembled monolayer on a silicon surface is a self-developing positive resist, which can be patterned with low energy electrons. Contact angle measurements have been used to quantify the efficiency of the exposure as a function of exposure dose and acceleration voltage. Ash formation was negligible, as a 3-aminopropyltriethoxysilane (APTES) self-assembled monolayer could be formed on the patterned area without an intermediate development stage. APTES/TMS patterns have been visualized with scanning electron microscopy at low energy and atomic force microscopy. The functionality of the patterns has been tested by selective deposition of carbon nanotubes.

Journal or Publication Title: Nano Letters
Volume: 2
Number: 10
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Fachgebiet Molekulare Nanostrukturen
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 08 Nov 2011 13:52
Official URL: http://dx.doi.org/10.1021/nl025679e
Identification Number: doi:10.1021/nl025679e
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