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Controlled fabrication of single-walled carbon nanotube electrodes by electron-beam-induced oxidation

Thiele, Cornelius ; Engel, Michael ; Hennrich, Frank ; Kappes, Manfred M. ; Johnsen, Klaus-Peter ; Frase, Carl G. ; Löhneysen, Hilbert v. ; Krupke, Ralph (2011)
Controlled fabrication of single-walled carbon nanotube electrodes by electron-beam-induced oxidation.
In: Applied Physics Letters, 99 (17)
doi: 10.1063/1.3656736
Artikel, Bibliographie

Kurzbeschreibung (Abstract)

The fabrication of metallic single-walled carbon nanotube electrodes separated by gaps of typically 20 nm width by electron-beam-induced oxidation is studied within an active device configuration. The tube conductance is measured continuously during the process. The experiment provides a statistical evaluation of gap sizes as well as the electron dose needed for gap formation. Also, the ability to precisely cut many carbon nanotubes in parallel is demonstrated. To show the practicality of the approach, devices of different scales were fabricated using sorted carbon nanotubes and dielectrophoretic deposition.

Typ des Eintrags: Artikel
Erschienen: 2011
Autor(en): Thiele, Cornelius ; Engel, Michael ; Hennrich, Frank ; Kappes, Manfred M. ; Johnsen, Klaus-Peter ; Frase, Carl G. ; Löhneysen, Hilbert v. ; Krupke, Ralph
Art des Eintrags: Bibliographie
Titel: Controlled fabrication of single-walled carbon nanotube electrodes by electron-beam-induced oxidation
Sprache: Englisch
Publikationsjahr: 24 Oktober 2011
Titel der Zeitschrift, Zeitung oder Schriftenreihe: Applied Physics Letters
Jahrgang/Volume einer Zeitschrift: 99
(Heft-)Nummer: 17
DOI: 10.1063/1.3656736
Kurzbeschreibung (Abstract):

The fabrication of metallic single-walled carbon nanotube electrodes separated by gaps of typically 20 nm width by electron-beam-induced oxidation is studied within an active device configuration. The tube conductance is measured continuously during the process. The experiment provides a statistical evaluation of gap sizes as well as the electron dose needed for gap formation. Also, the ability to precisely cut many carbon nanotubes in parallel is demonstrated. To show the practicality of the approach, devices of different scales were fabricated using sorted carbon nanotubes and dielectrophoretic deposition.

Freie Schlagworte: carbon nanotubes, electrodeposition, electrodes, nanofabrication, pulsed laser deposition, vaporisation
Fachbereich(e)/-gebiet(e): 11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft > Fachgebiet Molekulare Nanostrukturen
11 Fachbereich Material- und Geowissenschaften > Materialwissenschaft
11 Fachbereich Material- und Geowissenschaften
Hinterlegungsdatum: 08 Nov 2011 10:27
Letzte Änderung: 05 Mär 2013 09:55
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