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Controlled fabrication of single-walled carbon nanotube electrodes by electron-beam-induced oxidation

Thiele, Cornelius and Engel, Michael and Hennrich, Frank and Kappes, Manfred M. and Johnsen, Klaus-Peter and Frase, Carl G. and Löhneysen, Hilbert v. and Krupke, Ralph (2011):
Controlled fabrication of single-walled carbon nanotube electrodes by electron-beam-induced oxidation.
99, In: Applied Physics Letters, (17), pp. 173105(1-3), ISSN 00036951, [Online-Edition: http://dx.doi.org/10.1063/1.3656736],
[Article]

Abstract

The fabrication of metallic single-walled carbon nanotube electrodes separated by gaps of typically 20 nm width by electron-beam-induced oxidation is studied within an active device configuration. The tube conductance is measured continuously during the process. The experiment provides a statistical evaluation of gap sizes as well as the electron dose needed for gap formation. Also, the ability to precisely cut many carbon nanotubes in parallel is demonstrated. To show the practicality of the approach, devices of different scales were fabricated using sorted carbon nanotubes and dielectrophoretic deposition.

Item Type: Article
Erschienen: 2011
Creators: Thiele, Cornelius and Engel, Michael and Hennrich, Frank and Kappes, Manfred M. and Johnsen, Klaus-Peter and Frase, Carl G. and Löhneysen, Hilbert v. and Krupke, Ralph
Title: Controlled fabrication of single-walled carbon nanotube electrodes by electron-beam-induced oxidation
Language: English
Abstract:

The fabrication of metallic single-walled carbon nanotube electrodes separated by gaps of typically 20 nm width by electron-beam-induced oxidation is studied within an active device configuration. The tube conductance is measured continuously during the process. The experiment provides a statistical evaluation of gap sizes as well as the electron dose needed for gap formation. Also, the ability to precisely cut many carbon nanotubes in parallel is demonstrated. To show the practicality of the approach, devices of different scales were fabricated using sorted carbon nanotubes and dielectrophoretic deposition.

Journal or Publication Title: Applied Physics Letters
Volume: 99
Number: 17
Uncontrolled Keywords: carbon nanotubes, electrodeposition, electrodes, nanofabrication, pulsed laser deposition, vaporisation
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Fachgebiet Molekulare Nanostrukturen
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 08 Nov 2011 10:27
Official URL: http://dx.doi.org/10.1063/1.3656736
Identification Number: doi:10.1063/1.3656736
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